VERTICAL HEAT TREATMENT APPARATUS AND METHOD FOR OPERATING VERTICAL HEAT TREATMENT APPARATUS
TONEGAWA YAMATO, MOTOYAMA YUTAKA, FUKUSHIMA KOHEI, MATSUNAGA MASANOBU, TABUKI KEIJI
Year of Publication 18.01.2017
Get full text
Year of Publication 18.01.2017
Patent
DEPOSITION DEVICE
TONEGAWA YAMATO, MOTOYAMA YUTAKA, FUKUSHIMA KOHEI, MATSUNAGA MASANOBU, SUZUKI KEISUKE
Year of Publication 22.10.2015
Get full text
Year of Publication 22.10.2015
Patent
FILM FORMING APPARATUS USING GAS NOZZLES
TONEGAWA YAMATO, MOTOYAMA YUTAKA, FUKUSHIMA KOHEI, MATSUNAGA MASANOBU, SUZUKI KEISUKE
Year of Publication 06.10.2015
Get full text
Year of Publication 06.10.2015
Patent
LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS
YONEZAWA MASATO, CHENG HANSONG, HASEBE KAZUHIDE, XIAO MANCHAO, HAN BING, MATSUNAGA MASANOBU, YANG LIU, KARWACKI EUGENE JOSEPH, LEI XINJIAN
Year of Publication 22.04.2013
Get full text
Year of Publication 22.04.2013
Patent
FILM FORMATION METHOD AND APPARATUS, AND STORAGE MEDIUM
CHOU PAO HWA, YONEZAWA MASATO, HASEGAWA MASAYUKI, JANG, JAE HYUK, HASEBE KAZUHIDE, MATSUNAGA MASANOBU, SUZUKI KEISUKE
Year of Publication 02.06.2011
Get full text
Year of Publication 02.06.2011
Patent
VERTICAL FILM FORMATION APPARATUS, METHOD FOR USING SAME, AND STORAGE MEDIUM
CHOU PAO HWA, YONEZAWA MASATO, HASEGAWA MASAYUKI, HASEBE KAZUHIDE, MATSUNAGA MASANOBU
Year of Publication 02.06.2011
Get full text
Year of Publication 02.06.2011
Patent
FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
CHOU PAO HWA, NODERA NOBUTAKE, HASEBE KAZUHIDE, SATOH JUN, MATSUNAGA MASANOBU
Year of Publication 23.07.2009
Get full text
Year of Publication 23.07.2009
Patent