Characterization of High-Performance Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Circuits
Kawachi, Genshiro, Nakazaki, Yoshiaki, Ogawa, Hiroyuki, Jyumonji, Masayuki, Akita, Noritaka, Hiramatu, Masato, Azuma, Kazufumi, Warabisako, Terunori, Matsumura, Masakiyo
Published in Japanese Journal of Applied Physics (01.01.2007)
Published in Japanese Journal of Applied Physics (01.01.2007)
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Journal Article
Proposed Phase-Modulator Check System for Phase-Modulated Excimer-Laser Annealing
Taniguchi, Yukio, Azuma, Kazufumi, Matsumura, Masakiyo
Published in Japanese Journal of Applied Physics (01.03.2007)
Published in Japanese Journal of Applied Physics (01.03.2007)
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Journal Article
A Fluorinated Organic-Silica Film with Extremely Low Dielectric Constant
Yasutaka Uchida, Yasutaka Uchida, Kohshi Taguchi, Kohshi Taguchi, Satoshi Sugahara, Satoshi Sugahara, Masakiyo Matsumura, Masakiyo Matsumura
Published in Japanese Journal of Applied Physics (01.04.1999)
Published in Japanese Journal of Applied Physics (01.04.1999)
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