Advanced Method for Defect Characterization Using Fail Bit Analysis and Critical Area Simulation
Matsumoto, C, Hamamura, Y, Chida, T, Tsunoda, Y, Go, Naoki, Uozaki, H, Miyazaki, I, Kamohara, S, Kaneko, Y, Kanamitsu, K
Published in IEEE transactions on semiconductor manufacturing (01.05.2011)
Published in IEEE transactions on semiconductor manufacturing (01.05.2011)
Get full text
Journal Article
Conference Proceeding
METHOD OF PREDICTING FRACTION DEFECTIVE, PROGRAM OF PREDICTING FRACTION DEFECTIVE, METHOD OF CONTROLLING SEMICONDUCTOR MANUFACTURING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
HAMAMURA, YUICHI, TSUNODA, YOSHIYUKI, TSUNOKUNI, KAZUYUKI, MATSUMOTO, CHIZU
Year of Publication 25.03.2010
Get full text
Year of Publication 25.03.2010
Patent
Defective-ratio predicting method, defective-ratio predicting program, managing method for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device
TSUNODA YOSHIYUKI, MATSUMOTO CHIZU, HAMAMURA YUICHI, TSUNOKUNI KAZUYUKI
Year of Publication 17.12.2013
Get full text
Year of Publication 17.12.2013
Patent
DEFECTIVE-RATIO PREDICTING METHOD, DEFECTIVE-RATIO PREDICTING PROGRAM, MANAGING METHOD FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
TSUNODA YOSHIYUKI, MATSUMOTO CHIZU, HAMAMURA YUICHI, TSUNOKUNI KAZUYUKI
Year of Publication 14.07.2011
Get full text
Year of Publication 14.07.2011
Patent
TWI457942B
YAMASAKI, KANAME, MATSUMOTO, CHIZU, SAITOU, YOSHIKAZU, NAKAO, MICHINOBU
Year of Publication 21.10.2014
Get full text
Year of Publication 21.10.2014
Patent
TWI392886B
HAMAMURA, YUICHI, MATSUMOTO, CHIZU, TSUNODA, YOSHIYUKI, TSUNOKUNI, KAZUYUKI
Year of Publication 11.04.2013
Get full text
Year of Publication 11.04.2013
Patent
Semiconductor chip and method of repair design of the same
YAMASAKI, KANAME, MATSUMOTO, CHIZU, SAITOU, YOSHIKAZU, NAKAO, MICHINOBU
Year of Publication 01.06.2011
Get full text
Year of Publication 01.06.2011
Patent
Method of predicting fraction defective, program of predicting fraction defective, method of controlling semiconductor manufacturing device, and method of manufacturing semiconductor device
HAMAMURA, YUICHI, MATSUMOTO, CHIZU, TSUNODA, YOSHIYUKI, TSUNOKUNI, KAZUYUKI
Year of Publication 01.08.2010
Get full text
Year of Publication 01.08.2010
Patent