GALLIUM NITRIDE SUBSTRATE AND MANUFACTURING METHOD OF NITRIDE SEMICONDUCTOR CRYSTAL
KUBO SHUICHI, KAMATA KAZUNORI, IKEDA HIROTAKA, MATSUMOTO SO, MIKAWA YUTAKA, OHATA TATSUHIRO, TSUKADA YUSUKE, FUJISAWA HIDEO
Year of Publication 23.05.2019
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Year of Publication 23.05.2019
Patent