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"MATSUDA KOREHITO"
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"MATSUDA KOREHITO"
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JP2854674B
by
KOMATSU KAZUHIKO
,
MATSUDA KOREHITO
Year of Publication
03.02.1999
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METHOD FOR CHECKING X-RAY MASK
by
MATSUDA KOREHITO
,
SEKIMOTO MISAO
Year of Publication
27.09.1996
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JPH0563934B
by
MURASHITA TATSU
,
MATSUDA KOREHITO
Year of Publication
13.09.1993
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METHOD OF GENERATING FIGURE PATTERN
by
KOMATSU KAZUHIKO
,
MATSUDA KOREHITO
Year of Publication
29.01.1992
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JPH0352211B
by
MATSUDA KOREHITO
,
OOKUBO TSUNEO
Year of Publication
09.08.1991
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CHARGED PARTICLE BEAM LITHOGRAPHY
by
ISHII KIYOSHI
,
MATSUDA KOREHITO
Year of Publication
11.06.1991
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FORMATION OF RESIST PATTERN FOR LIFT-OFF
by
ISHII KIYOSHI
,
MATSUDA KOREHITO
Year of Publication
15.03.1991
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ELECTRON-BEAM DRAWING APPARATUS
by
IWATATE KAZUMI
,
MATSUDA KOREHITO
Year of Publication
10.12.1990
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BEAM BLANKING STRUCTURE FOR CHARGED PARTICLE BEAM LITHOGRAPHY DEVICE
by
IWATATE KAZUMI
,
MATSUDA KOREHITO
Year of Publication
05.12.1990
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CHARGED PARTICLE BEAM LITHOGRAPHY EQUIPMENT
by
IWATATE KAZUMI
,
MATSUDA KOREHITO
Year of Publication
19.09.1990
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CHARGED BEAM PICTURE-DRAWING DEVICE
by
IWATATE KAZUMI
,
MATSUDA KOREHITO
Year of Publication
17.09.1990
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ELECTRON BEAM LITHOGRAPHY DEVICE
by
IWATATE KAZUMI
,
MATSUDA KOREHITO
Year of Publication
06.09.1990
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FORMATION OF PATTERN
by
IWATATE KAZUMI
,
MATSUDA KOREHITO
Year of Publication
28.08.1989
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METHOD FOR APPARATUS FOR FORMING PATTERN
by
MATSUDA KOREHITO
,
HARADA KATSUYUKI
Year of Publication
07.09.1985
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CORRECTION OF DEFLECTION DISTORTION
by
MATSUDA KOREHITO
,
OOKUBO TSUNEO
Year of Publication
26.10.1984
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EXPOSURING DEVICE WITH ELECTRON BEAM
by
TAKAGI KIICHI
,
MATSUDA KOREHITO
Year of Publication
16.08.1984
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BEAM SHAPE MEASURING APPARATUS
by
MURASHITA TATSU
,
MATSUDA KOREHITO
Year of Publication
21.07.1983
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CORRECTING APPARATUS FOR ELECTRON BEAM ROTATION ON ELECTRO OPTICAL MIRROR
by
MURASHITA TATSU
,
MATSUDA KOREHITO
Year of Publication
08.05.1982
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JP2964109B
by
KAWAI YOSHIO
,
TANAKA HARUYORI
,
MATSUDA KOREHITO
Year of Publication
18.10.1999
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JP2937248B
by
KAWAI YOSHIO
,
TANAKA HARUYORI
,
MATSUDA KOREHITO
Year of Publication
23.08.1999
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