Use of Multifunctional Carboxylic Acids and Hydrogen Peroxide To Improve Surface Quality and Minimize Phosphine Evolution During Chemical Mechanical Polishing of Indium Phosphide Surfaces
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Published in Industrial & engineering chemistry research (07.08.2013)
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Published in Colloids and surfaces. A, Physicochemical and engineering aspects (05.09.2011)
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Chemical mechanical planarization of patterned InP in shallow trench isolation (STI) template structures using hydrogen peroxide–based silica slurries containing oxalic acid or citric acid
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Year of Publication 04.06.2019
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Year of Publication 04.06.2019
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Role of polycation adsorption in poly-Si, SiO sub(2 and Si) sub(3)N sub(4 removal during chemical mechanical polishing: Effect of polishing pad surface chemistry)
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Published in Colloids and surfaces. A, Physicochemical and engineering aspects (05.09.2011)
Published in Colloids and surfaces. A, Physicochemical and engineering aspects (05.09.2011)
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Journal Article
Role of polycation adsorption in poly-Si, SiO 2 and Si 3N 4 removal during chemical mechanical polishing: Effect of polishing pad surface chemistry
Penta, Naresh K., Matovu, John B., Veera, P.R. Dandu, Krishnan, Sitaraman, Babu, S.V.
Published in Colloids and surfaces. A, Physicochemical and engineering aspects (2011)
Published in Colloids and surfaces. A, Physicochemical and engineering aspects (2011)
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Year of Publication 18.05.2021
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Stair step structures including insulative materials, and related devices
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Year of Publication 10.08.2021
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Year of Publication 26.09.2019
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Year of Publication 26.09.2019
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STAIR STEP STRUCTURES INCLUDING INSULATIVE MATERIALS, AND RELATED DEVICES
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Year of Publication 25.06.2020
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Year of Publication 25.06.2020
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Damarla, Gowrisankar, Haller, Gordon A, Vegunta, Sri Sai Sivakumar, Mokhna Rau, Prakash Rau, Park, Matthew R, Zhao, Jun, Matovu, John B, Daycock, David A
Year of Publication 11.06.2019
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Year of Publication 11.06.2019
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Semiconductor devices including a stair step structure, and related methods
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Year of Publication 24.03.2020
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Damarla, Gowrisankar, Haller, Gordon A, Vegunta, Sri Sai Sivakumar, Mokhna Rau, Prakash Rau, Park, Matthew R, Zhao, Jun, Matovu, John B, Daycock, David A
Year of Publication 25.10.2018
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Year of Publication 25.10.2018
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SEMICONDUCTOR DEVICES INCLUDING A STAIR STEP STRUCTURE, AND RELATED METHODS
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Year of Publication 04.07.2019
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Year of Publication 04.07.2019
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VERTICAL MEMORY DEVICE WITH NON-FUNCTIONAL PILLARS
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Year of Publication 11.05.2018
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Methods of forming semiconductor structures having stair step structures
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Year of Publication 23.04.2019
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DARMARLA, Gowrisankar, MOKHNA RAU, Prakash Rau, DAYCOCK, David A, MATOVU, John B, VEGUNTA, Sri Sai Sivakumar, HALLER, Gordon A, ZHAO, Jun, PARK, Matthew R
Year of Publication 05.04.2018
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Year of Publication 05.04.2018
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Park Matthew R, Daycock David A, Vegunta Sri Sai Sivakumar, Mokhna Rau Prakash Rau, Zhao Jun, Matovu John B, Damarla Gowrisankar, Haller Gordon A
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Year of Publication 02.01.2018
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Festkörperspeicherkomponente
Haller, Gordon A, Vegunta, Sri Sai Sivakumar, Mokhna Rau, Prakash Rau, Darmarla, Gowrisankar, Park, Matthew R, Zhao, Jun, Matovu, John B, Daycock, David A
Year of Publication 19.06.2019
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Year of Publication 19.06.2019
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Vertical memory device with non-functional pillars
HALLER GORDON A, PARK MATTHEW R, VEGUNTA SRI SAI SIVAKUMAR, DARMARLA GOWRISANKAR, ZHAO JUN, MOKHNA RAU PRAKASH RAU, DAYCOCK DAVID A, MATOVU JOHN B
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Year of Publication 16.04.2019
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