Generating alignment signal based on local alignment mark deformation
DASTRI, SAHARADAT, MATHIJSSEN SIMON GIJSBERT JOSEPHUS, ENGBLOM PETER DAVID, ARTS IGOR MATHEUS PASCAL
Year of Publication 31.01.2023
Get full text
Year of Publication 31.01.2023
Patent
ALIGNMENT METHOD
HULSEBOS, Edo, Maria, DEMERGIS, Vassili, MATHIJSSEN, Simon, Gijsbert, Josephus, BIJNEN, Franciscus, Godefridus, Casper
Year of Publication 22.02.2018
Get full text
Year of Publication 22.02.2018
Patent
Metrology Method and Apparatus and Computer Program
BHATTACHARYYA, Kaustuve, BYUN, Jinmoo, JANG, Won-Jae, NOOT, Marc Johannes, KIM, Hyun-Su, DAVIS, Timothy Dugan, MATHIJSSEN, Simon Gijsbert Josephus
Year of Publication 31.01.2019
Get full text
Year of Publication 31.01.2019
Patent
METROLOGY METHOD AND APPARATUS AND COMPUTER PROGRAM
NOOT, Marc, BYUN, Jin-Moo, MATHIJSSEN, Simon, Gijsbert, Josephus, BHATTACHARYYA, Kaustuve, KIM, Hyun Su, JANG, Won-Jae
Year of Publication 30.01.2019
Get full text
Year of Publication 30.01.2019
Patent
METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
HENRICUS JOHANNES LAMBERTUS MEGENS, HAICO VICTOR KOK, IGOR MATHEUS PETRONELLA AARTS, PATRICIUS ALOYSIUS JACOBUS TINNEMANS, SIMON GIJSBERT JOSEPHUS MATHIJSSEN, KAUSTUVE BHATTACHARYYA, STEFAN CAROLUS JACOBUS ANTONIUS KEIJ
Year of Publication 09.01.2020
Get full text
Year of Publication 09.01.2020
Patent
Apparatus for delivering gas and illumination source for generating high harmonic radiation
Brussaard, Gerrit Jacobus Hendrik, Mathijssen, Simon Gijsbert Josephus, Smorenburg, Petrus Wilhelmus, Roobol, Sander Bas, Lin, Nan, Srivastava, Sudhir, Donders, Sjoerd Nicolaas Lambertus, Bustraan, Krijn Frederik
Year of Publication 07.01.2020
Get full text
Year of Publication 07.01.2020
Patent
Alignment sensor and lithographic apparatus
Tinnemans Patricius Aloysius Jacobus, Den Boef Arie Jeffrey, Mathijssen Simon Gijsbert Josephus, Kreuzer Justin Lloyd
Year of Publication 02.01.2018
Get full text
Year of Publication 02.01.2018
Patent
Methods and Apparatus for Predicting Performance of a Measurement Method, Measurement Method and Apparatus
Mathijssen, Simon Gijsbert Josephus, Freisem, Lars Christian, Eikema, Kjeld Sijbrand Eduard, WITTE, Stefan Michiel, Jansen, Gijsbert Simon Matthijs
Year of Publication 06.12.2018
Get full text
Year of Publication 06.12.2018
Patent