Search Results - "MATHEW CHEERAN ABRAHAM" :: K.UTB vyhledávací portál

Loading…

CLEANING SURFACE OF OPTIC LOCATED IN CHAMBER OF EXTREME ULTRAVIOLET LIGHT SOURCE

by BAEK JONGHOON, MATHEW CHEERAN ABRAHAM
Year of Publication 15.06.2023

Get full text

Patent

Loading…

SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF EUV VESSEL AND EUV COLLECTOR

by DAVID ROBERT EVANS, BAEK JONGHOON, JACK MICHAEL GAZZA, MATHEW CHEERAN ABRAHAM
Year of Publication 02.12.2021

Get full text

Patent

Loading…

CLEANING A SURFACE OF AN OPTIC WITHIN A CHAMBER OF AN EXTREME ULTRAVIOLET LIGHT SOURCE

by JONGHOON BAEK, MATHEW CHEERAN ABRAHAM
Year of Publication 08.05.2019

Get full text

Patent

Loading…

Apparatus and method for extending target material delivery system lifetime

by Abraham, Mathew Cheeran, Rajyaguru, Chirag, Rollinger, Bob, Vaschenko, Georgiy Olegovich, Lukens, Joshua Mark, Ershov, Alexander Igorevich
Year of Publication 27.06.2023

Get full text

Patent

Loading…

APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME

by Abraham, Mathew Cheeran, Rajyaguru, Chirag, Rollinger, Bob, Vaschenko, Georgiy Olegovich, Lukens, Joshua Mark, Ershov, Alexander Igorevich
Year of Publication 16.12.2021

Get full text

Patent

Loading…

APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME

by RAJYAGURU, Chirag, ERSHOV, Alexander Igorevich, LUKENS, Joshua Mark, ABRAHAM, Mathew Cheeran, ROLLINGER, Bob, VASCHENKO, Georgiy Olegovich
Year of Publication 08.09.2021

Get full text

Patent

Loading…

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

by Abraham, Mathew Cheeran, Baek, Jonghoon, Evans, David Robert, Gazza, Jack Michael
Year of Publication 18.05.2021

Get full text

Patent

Loading…

APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME

by CHIRAG RAJYAGURU, GEORGIY OLEGOVICH VASCHENKO, ALEXANDER IGOREVICH ERSHOV, JOSHUA MARK LUKENS, MATHEW CHEERAN ABRAHAM, BOB ROLLINGER
Year of Publication 13.05.2020

Get full text

Patent

Loading…

APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME

by RAJYAGURU, Chirag, ERSHOV, Alexander Igorevich, LUKENS, Joshua Mark, ABRAHAM, Mathew Cheeran, ROLLINGER, Bob, VASCHENKO, Georgiy Olegovich
Year of Publication 07.05.2020

Get full text

Patent

Loading…

SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF EUV VESSEL AND EUV COLLECTOR

by EVANS, David Robert, ABRAHAM, Mathew Cheeran, GAZZA, Jack Michael, BAEK, Jonghoon
Year of Publication 30.01.2020

Get full text

Patent

Loading…

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

by Abraham, Mathew Cheeran, Baek, Jonghoon, Evans, David Robert, Gazza, Jack Michael
Year of Publication 12.11.2019

Get full text

Patent

Loading…

SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF EUV VESSEL AND EUV COLLECTOR

by EVANS, David Robert, ABRAHAM, Mathew Cheeran, GAZZA, Jack Michael, BAEK, Jonghoon
Year of Publication 19.09.2019

Get full text

Patent

Loading…

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

by Abraham, Mathew Cheeran, Baek, Jonghoon, Evans, David Robert, Gazza, Jack Michael
Year of Publication 23.07.2019

Get full text

Patent

Loading…

Apparatus for and method of extending target material delivery system lifetime

by ABRAHAM, MATHEW CHEERAN, ROLLINGER, BOB, RAJYAGURU, CHIRAG, VASCHENKO, GEORGIY OLEGOVICH, LUKENS, JOSHUA MARK, ERSHOV, ALEXANDER IGOREVICH
Year of Publication 21.12.2023

Get full text

Patent