웨이퍼 프로세싱 시스템들을 위한 볼트 결합된 웨이퍼 척 열 관리 시스템들 및 방법들
LUBOMIRSKY DMITRY, NATARAJAN SARAVANAKUMAR, CHOUREY SHUBHAM, MATH ANANDA SEELAVANTH, BENJAMINSON DAVID
Year of Publication 16.03.2018
Get full text
Year of Publication 16.03.2018
Patent
Workpiece holder
LUBOMIRSKY, DMITRY, BENJAMINSON, DAVID, SHUBHAM, CHOUREY, MATH, ANANDA SEELAVANTH, NATARAJAN, SARAVANAKUMAR
Year of Publication 11.07.2023
Get full text
Year of Publication 11.07.2023
Patent
Thermal management systems and methods for wafer processing systems
LUBOMIRSKY DMITRY, NATARAJAN SARAVANAKUMAR, CHOUREY SHUBHAM, MATH ANANDA SEELAVANTH, BENJAMINSON DAVID
Year of Publication 15.12.2017
Get full text
Year of Publication 15.12.2017
Patent