A Systematic Study on BEOL Defectivity Control for Future AI Application
Chen, James H.-C., Lie, Fee li, DeVries, Scott, Boye, Carol, Mehta, Sanjay, Devarajan, Thamarai S., Silvestre, Mary-Claire, Tseng, Wei-Tsu, Aminpur, Massud A
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
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Conference Proceeding
Silicon dry etching in hydrogen iodide plasmas : Surface diagnostics and technological applications
RICHTER, H. H, AMINPUR, M.-A, ERZGRÄBER, H. B, WOLFF, A, KRÜGER, D, DEHOFF, A, REETZ, M
Published in Japanese Journal of Applied Physics (01.07.1997)
Published in Japanese Journal of Applied Physics (01.07.1997)
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Journal Article
Strategies for single patterning of contacts for 32nm and 28nm technology
Morgenfeld, B., Stobert, I., Haffner, H., An, J., Kanai, H., Ostermayr, M., Chen, N., Aminpur, M., Brodsky, C., Thomas, A.
Published in 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2011)
Published in 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2011)
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Conference Proceeding
Silicon Trench Etch Uniformity Improvement for Microloading and Macro-to-Macro Loading for sub-14nmNode
Yang, Yong Mo, Lim, Sang Woo, Hong, Junsic, Park, Mira, Yang, Yinxiao, Cho, Wang Keun, Adams, Charlotte, Aminpur, Massud, Maeng, Chang Ho
Published in 2018 IEEE International Interconnect Technology Conference (IITC) (01.06.2018)
Published in 2018 IEEE International Interconnect Technology Conference (IITC) (01.06.2018)
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