Redeposition-Free Deep Etching in Small KY(WO 4 ) 2 Samples
Mikalsen Martinussen, Simen Mikalsen, Frentrop, Raimond N, Dijkstra, Meindert, Garcia-Blanco, Sonia Maria
Published in Micromachines (Basel) (24.11.2020)
Published in Micromachines (Basel) (24.11.2020)
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Journal Article
광원, MEMS 광 스위치, 센서, 및 이들을 제조하는 방법들
TIGGELAAR ROALD MICHEL, MARTINUSSEN SIMEN MIKALSEN, BERENSCHOT JOHAN WILLEM, TAS NIELS ROELOF, GARCIA BLANCO SONIA MARIA
Year of Publication 12.12.2023
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Year of Publication 12.12.2023
Patent