기판 프로세싱 도구용 샤워헤드
MARTIN KEITH JOSEPH, MADSEN ERIC, LUO BIN, DONNELLY SEAN M, WOMACK JEFFREY
Year of Publication 27.09.2024
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Year of Publication 27.09.2024
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샤워헤드 면판 구성
MARTIN KEITH JOSEPH, BABBAR YOGESH, SUBRAMONIUM PRAMOD, LUO BIN, TOPPING STEPHEN, CHENG WEIFENG
Year of Publication 01.08.2024
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Year of Publication 01.08.2024
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멀티-스테이션 프로세싱 모듈들을 위한 리브 커버 (rib cover)
MARTIN KEITH JOSEPH, SCHROEDER TODD, YANG JIALING, WOO CHEE WHYE, NIE JIUYUAN, MCLAUGHLIN KEVIN M
Year of Publication 17.05.2023
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Year of Publication 17.05.2023
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프로세스 챔버의 인 시츄 (in situ) 표면 코팅
MARTIN KEITH JOSEPH, LEESER KARL FREDERICK, BAILEY CURTIS W, WOMACK JEFFREY, BRUENING RIGEL MARTIN, LINEBARGER NICK RAY JR
Year of Publication 14.10.2022
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Year of Publication 14.10.2022
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SHOWERHEAD FOR SUBSTRATE PROCESSING TOOL
MADSEN, Eric, LUO, Bin, DONNELLY, Sean M, MARTIN, Keith Joseph, WOMACK, Jeffrey
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
Patent
RIB COVER FOR MULTI-STATION PROCESSING MODULES
Yang, Jialing, Nie, Jiuyuan, Schroeder, Todd, Woo, Chee Whye, Martin, Keith Joseph, McLaughlin, Kevin M
Year of Publication 12.10.2023
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Year of Publication 12.10.2023
Patent
SHOWERHEAD FACEPLATE CONFIGURATIONS
BABBAR, Yogesh, LUO, Bin, CHENG, Weifeng, MARTIN, Keith Joseph, SUBRAMONIUM, Pramod, TOPPING, Stephen
Year of Publication 01.06.2023
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Year of Publication 01.06.2023
Patent
PARASITIC PLASMA SUPPRESSOR
BABBAR, Yogesh, JAFARIAN-TEHRANI, Sam, CHENG, Weifeng, MARTIN, Keith Joseph, BRENINGER, Andrew H, FRENCH, David, SAKIYAMA, Yukinori, BAILEY, Curtis W
Year of Publication 04.01.2024
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Year of Publication 04.01.2024
Patent
IN SITU SURFACE COATING OF PROCESS CHAMBER
Linebarger, JR., Nick Ray, Leeser, Karl Frederick, Bailey, Curtis W, Bruening, Rigel Martin, Womack, Jeffrey, Martin, Keith Joseph
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
Patent
RIB COVER FOR MULTI-STATION PROCESSING MODULES
WOO, Chee Whye, SCHROEDER, Todd, MCLAUGHLIN, Kevin M, MARTIN, Keith Joseph, YANG, Jialing, NIE, Jiuyuan
Year of Publication 17.03.2022
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Year of Publication 17.03.2022
Patent
IN SITU SURFACE COATING OF PROCESS CHAMBER
MARTIN, Keith Joseph, BRUENING, Rigel Martin, WOMACK, Jeffrey, LINEBARGER, Nick Ray, LEESER, Karl Frederick, BAILEY, Curtis W
Year of Publication 12.08.2021
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Year of Publication 12.08.2021
Patent
Showerhead panel configuration
MARTIN KEITH JOSEPH, LUO BIN, TOPPING STEPHEN, CHENG WEIFENG, SUBRAMONIAM, PRAMOD, BABBAR, YOGESH
Year of Publication 09.07.2024
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Year of Publication 09.07.2024
Patent
Showerhead faceplate configurations
SUBRAMONIUM, PRAMOD, LUO, BIN, CHENG, WEI-FENG, TOPPING, STEPHEN, MARTIN, KEITH JOSEPH, BABBAR, YOGESH
Year of Publication 16.10.2023
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Year of Publication 16.10.2023
Patent
Rib cover for multi-station processing module
MARTIN KEITH JOSEPH, SCHROEDER TODD, YANG JIALING, WU ZHIHUAI, NIE JIUYUAN, MCLAUGHLIN KEVIN M
Year of Publication 03.02.2023
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Year of Publication 03.02.2023
Patent
Parasitic plasma suppressor
JAFARIAN-TEHRANI, SAM, CHENG, WEI-FENG, BRENINGER, ANDREW H, FRENCH, DAVID, MARTIN, KEITH JOSEPH, BABBAR, YOGESH, SAKIYAMA, YUKINORI, BAILEY, CURTIS W
Year of Publication 16.04.2024
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Year of Publication 16.04.2024
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