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Year of Publication 30.08.2012
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Year of Publication 13.07.2017
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Year of Publication 13.07.2017
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Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator
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Year of Publication 04.04.2016
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Year of Publication 04.04.2016
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ACTUATOR, POSITIONING DEVICE, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING AN ACTUATOR
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Year of Publication 14.01.2016
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Year of Publication 14.01.2016
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Electromagnetic actuator, stage apparatus and lithographic apparatus
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Year of Publication 01.04.2014
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Year of Publication 01.04.2014
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ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
MARTENS, SIMON, BERNARDUS, CORNELIS, MARIA, HOL, SVEN, ANTOIN, JOHAN, VERMEULEN, JOHANNES, PETRUS, MARTINUS, BERNARDUS, HUANG, YANG-SHAN, KIMMAN, MAARTEN, HARTGER, ZHOU, WEI, VAN EIJK, JAN, KOOT, MICHAEL ,WILHELMUS, THEODORUS, NIJSSE, GERARD, JOHANNES, PIETER, DE BOEIJ, JEROEN
Year of Publication 27.09.2012
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Year of Publication 27.09.2012
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ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
DE BOEIJ JEROEN, VAN EIJK JAN, MARTENS SIMON BERNARDUS CORNELIS MARIA, HOL SVEN ANTOIN JOHAN, ZHOU WEI, HUANG YANG-SHAN, KIMMAN MAARTEN HARTGER, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, KOOT MICHAEL WILHELMUS THEODORUS, NIJSSE GERARD JOHANNES PIETER
Year of Publication 23.08.2012
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Year of Publication 23.08.2012
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Electromagnetic actuator, stage apparatus and lithographic apparatus
NIJSSE, GERARD JOHANNES PIETER, HUANG, YANG SHAN, VERMEULEN, JOHANNES PETRUS MARTINUS BERNARDUS, HOL, SVEN ANTOIN JOHAN, ZHOU, WEI, VAN EIJK, JAN, MARTENS, SIMON BERNARDUS CORNELIS MARIA, DE BOEIJ, JEROEN, KOOT, MICHAEL WILHELMUS THEODORUS, KIMMAN, MAARTEN HARTGER
Year of Publication 01.10.2014
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Year of Publication 01.10.2014
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Electromagnetic actuator, stage apparatus and lithographic apparatus
NIJSSE, GERARD JOHANNES PIETER, VERMEULEN, JOHANNES PETRUS MARTINUS BERNARDUS, HOL, SVEN ANTOIN JOHAN, HUANG, YANG-SHAN, ZHOU, WEI, VAN EIJK, JAN, MARTENS, SIMON BERNARDUS CORNELIS MARIA, DE BOEIJ, JEROEN, KOOT, MICHAEL WILHELMUS THEODORUS, KIMMAN, MAARTEN HARTGER
Year of Publication 16.12.2012
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Year of Publication 16.12.2012
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