Dressing a wafer polishing pad
Stinson, Mark G, Esayanur, Madhavan S, Buese, Dennis, Corsi, Emanuele, Bovio, Ezio, Rinaldi, Antonio Maria, Flannery, Larry
Year of Publication 07.12.2010
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Year of Publication 07.12.2010
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System and method for dressing a wafer polishing pad
CORSI EMANUELE, BOVIO EZIO, STINSON MARK G, FLANNERY LARRY, ESAYANUR MADHAVAN S, BUESE DENNIS, RINALDI ANTONIO MARIA
Year of Publication 07.12.2010
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Year of Publication 07.12.2010
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Dressing a wafer polishing pad
CORSI EMANUELE, BOVIO EZIO, STINSON MARK G, FLANNERY LARRY, ESAYANUR MADHAVAN S, BUESE DENNIS, RINALDI ANTONIO MARIA
Year of Publication 07.12.2010
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Year of Publication 07.12.2010
Patent
System and method for dressing a wafer polishing pad
Stinson, Mark G, Esayanur, Madhavan S, Buese, Dennis, Corsi, Emanuele, Bovio, Ezio, Rinaldi, Antonio Maria, Flannery, Larry
Year of Publication 07.12.2010
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Year of Publication 07.12.2010
Patent
SYSTEM AND METHOD FOR DRESSING A WAFER POLISHING PAD
CORSI EMANUELE, BOVIO EZIO, STINSON MARK G, FLANNERY LARRY, ESAYANUR MADHAVAN S, BUESE DENNIS, RINALDI ANTONIO MARIA
Year of Publication 09.07.2009
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Year of Publication 09.07.2009
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Dressing a Wafer Polishing Pad
CORSI EMANUELE, BOVIO EZIO, STINSON MARK G, FLANNERY LARRY, ESAYANUR MADHAVAN S, RINALDI ANTONIO M, BUESE DENNIS
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Year of Publication 10.01.2008
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Silicon wafer etching process and composition
DOANE THOMAS E, STINSON MARK G, BJELOPAVLIC MICK, SCHMIDT JUDITH A, ERK HENRY F, CAPSTICK JAMES R, GRABBE ALEXIS, ZHANG GUOQIANG (DAVID), VERMEIRE JOZEF G
Year of Publication 29.01.2008
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Year of Publication 29.01.2008
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Silicon wafer etching process and composition
Stinson, Mark G, Erk, Henry F, Zhang, Guoqiang (David), Bjelopavlic, Mick, Grabbe, Alexis, Vermeire, Jozef G, Schmidt, Judith A, Doane, Thomas E, Capstick, James R
Year of Publication 29.01.2008
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Year of Publication 29.01.2008
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Method for the preparation of a semiconductor substrate with a non-uniform distribution of stabilized oxygen precipitates
GAMBARO DANIELA, RAVANI MARCO, FALSTER ROBERT J, RIES MICHAEL J, STINSON MARK G, SACCHETTI LAURA, BORGINI MARCO, STANDLEY ROBERT W
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Year of Publication 13.04.2006
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Year of Publication 26.01.2006
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Year of Publication 26.01.2006
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Silicon wafer etching process and composition
ZHANG GUOQIANG, DOANE THOMAS E, STINSON MARK G, BJELOPAVLIC MICK, SCHMIDT JUDITH A, ERK HENRY F, CAPSTICK JAMES R, GRABBE ALEXIS, VERMEIRE JOZEF G
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Year of Publication 19.01.2006
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METHOD AND DEVICE FOR DISPLACING WAFERS IN A DEPOSITION REACTOR
STINSON, MARK, G, DAUCHESS, DANIEL, A., III, CHOWNING, GREGORY, K, BAKER, KENNETH, W
Year of Publication 15.11.2001
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Year of Publication 15.11.2001
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Method and device for displacing wafers in a deposition reactor
DAUCHESS III, DANIEL A, BAKER, KENNETH W, STINSON, MARK G, CHOWNING, GREGORY K
Year of Publication 01.01.2001
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Year of Publication 01.01.2001
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Method for the preparation of a semiconductor substrate with a non-uniform distribution of stabilized oxygen precipitates
GAMBARO DANIELA, RAVANI MARCO, FALSTER ROBERT J, RIES MICHAEL J, STINSON MARK G, SACCHETTI LAURA, BORGINI MARCO, STANDLEY ROBERT W
Year of Publication 05.12.2002
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Year of Publication 05.12.2002
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PROCESS FOR ETCHING SILICON WAFERS
CAPSTICK, JAMES, R, SING, ANNLIE, STINSON, MARK, G, DOANE, THOMAS, E, ZHANG, GUOQIANG, (DAVID), SCHMIDT, JUDITH, A, ERK, HENRY, F, GRABBE, ALEXIS
Year of Publication 11.11.2004
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Year of Publication 11.11.2004
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