SACRIFICIAL METAL LINER FOR COPPER INTERCONNECTS
STAMPER ANTHONY K, SIMON ANDREW H, COONEY EDWARD C. III, GEFFKEN ROBERT M, MARINO JEFFREY R
Year of Publication 21.10.2005
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Year of Publication 21.10.2005
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Ti liner for copper interconnect with low-k dielectric
CLEVENGER, LARRY, SIMON, ANDREW H., KLEPEIS, STANLEY J, MARINO, JEFFREY R, LU, HSIAO-LING
Year of Publication 01.09.2005
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Year of Publication 01.09.2005
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SACRIFICIAL METAL LINER FOR COPPER INTERCONNECTS
STAMPER, ANTHONY K, GEFFKEN, ROBERT M, COONEY, EDWARD C., III, MARINO, JEFFREY R, SIMON, ANDREW H
Year of Publication 19.08.2004
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Year of Publication 19.08.2004
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SACRIFICIAL METAL LINER FOR COPPER INTERCONNECTS
SIMON, ANDREW, H, COONEY, EDWARD, C., III, STAMPER, ANTHONY, K, MARINO, JEFFREY, R, GEFFKEN, ROBERT, M
Year of Publication 19.08.2004
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Year of Publication 19.08.2004
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Sacrificial metal liner for copper
STAMPER ANTHONY K, SIMON ANDREW H, COONEY EDWARD C, GEFFKEN ROBERT M, MARINO JEFFREY R
Year of Publication 05.08.2004
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Year of Publication 05.08.2004
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Sacrificial Metal Liner For Copper
STAMPER ANTHONY K, SIMON ANDREW H, COONEY EDWARD C, GEFFKEN ROBERT M, MARINO JEFFREY R
Year of Publication 05.08.2004
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Year of Publication 05.08.2004
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Interlevel dielectric layer and metal layer sealing
STANDAERT THEODORUS E, MCGAHAY VINCENT J, KASTENMEIER BERND E, BIOLSI PETER E, MARINO JEFFREY R, CLEVENGER LAWRENCE A, HICHRI HABIB, LANE MICHAEL W, ANGYAL MATTHEW S
Year of Publication 08.05.2007
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Year of Publication 08.05.2007
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INTERLEVEL DIELECTRIC LAYER AND METAL LAYER SEALING
STANDAERT THEODORUS E, MCGAHAY VINCENT J, KASTENMEIER BERND E, BIOLSI PETER E, MARINO JEFFREY R, CLEVENGER LAWRENCE A, HICHRI HABIB, LANE MICHAEL W, ANGYAL MATTHEW S
Year of Publication 02.02.2006
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Year of Publication 02.02.2006
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Structure and method for reducing thermo-mechanical stress in stacked vias
Dalton, Timothy, Das, Sanjit, Engel, Brett, Herbst, Brian, Hichri, Habib, Kastenmeier, Bernd, Malone, Kelly, Marino, Jeffrey, Martin, Arthur, McGahay, Vincent, Melville, Ian, Narayan, Chandrasekhar, Petrarca, Kevin, Volant, Richard
Year of Publication 17.06.2004
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Year of Publication 17.06.2004
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Ti LINER FOR COPPER INTERCONNECT WITH LOW-K DIELECTRIC
LU HSIAO-LING, SIMON ANDREW HERBERT, MARINO JEFFREY, WANG YUN-YU, WONG KWONG HON, CLEVENGER LARRY, KLEPEIS STANLEY, YANG CHIHAO
Year of Publication 03.06.2004
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Year of Publication 03.06.2004
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Interconnection structure and method for forming the same
LU HSIAO-LING, SIMON ANDREW HERBERT, KLEPEIS STANLEY J, MARINO JEFFREY R, WANG YUN-YU, WONG KWONG HON, CLEVENGER LARRY, YANG CHIHAO
Year of Publication 02.06.2004
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Year of Publication 02.06.2004
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Method of depositing material containing Si or Ge on a Cu or Ni surface
FARRELL, CURTIS EDWARD, KANG, SUNG KWON, BRADY, MICHAEL JOHN, MARINO, JEFFREY ROBERT
Year of Publication 19.05.1999
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Year of Publication 19.05.1999
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