균일성을 달성하기 위한 듀티 사이클 제어
MARAKHTANOV ALEXEI M, JI BING, HOLLAND JOHN P, KOZAKEVICH FELIX LEIB, BHOWMICK RANADEEP
Year of Publication 19.09.2023
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Year of Publication 19.09.2023
Patent
전극들에 제공된 RF 신호들 사이의 위상차를 결정하기 위한 시스템들 및 방법들
MARAKHTANOV ALEXEI M, YANAGAWA TAKUMI, LUCCHESI KENNETH, RIGHETTI FABIO, JIN ZEHUA, HOLLAND JOHN PATRICK, KOZAKEVICH FELIX LEIB
Year of Publication 21.06.2024
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Year of Publication 21.06.2024
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구형 (SQUARE-SHAPED) 펄스 신호들을 사용하기 위한 플라즈마 시스템들 및 방법들
MARAKHTANOV ALEXEI M, PATRICK ROGER, DORAI RAJESH, LUCCHESI KENNETH, RIGHETTI FABIO, HOLLAND JOHN P, BENNET ALEXANDER DECLAN, ZHAO LIN
Year of Publication 26.03.2024
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Year of Publication 26.03.2024
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플라즈마 시스 (sheath) 특성을 제어하기 위한 시스템들 및 방법들
MARAKHTANOV ALEXEI M, JI BING, HOLLAND JOHN PATRICK, CARON JAMES EUGENE, KOZAKEVICH FELIX LEIB, BHOWMICK RANADEEP
Year of Publication 04.12.2023
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Year of Publication 04.12.2023
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저 주파수 RF 생성기 및 연관된 정전 척 (electrostatic chuck)
MARAKHTANOV ALEXEI M, MATYUSHKIN ALEXANDER, JI BING, HOLLAND JOHN PATRICK, KOZAKEVICH FELIX LEIB, BHOWMICK RANADEEP
Year of Publication 01.08.2023
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Year of Publication 01.08.2023
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자기장을 사용한 플라즈마 방전 균일도 제어
MARAKHTANOV ALEXEI M, DE LA LLERA ANTHONY, PANAGOPOULOS THEODOROS, PAENG DONG WOO, JI BING, HOLLAND JOHN P
Year of Publication 16.05.2023
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Year of Publication 16.05.2023
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LOW FREQUENCY RF GENERATOR AND ASSOCIATED ELECTROSTATIC CHUCK
Bhowmick, Ranadeep, Holland, John Patrick, Marakhtanov, Alexei M, Kozakevich, Felix Leib, Ji, Bing, Matyushkin, Alexander
Year of Publication 31.08.2023
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Year of Publication 31.08.2023
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UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH
Holland, John P, Marakhtanov, Alexei M, Kozakevich, Felix Leib, Ji, Bing
Year of Publication 10.08.2023
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Year of Publication 10.08.2023
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SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC
Bhowmick, Ranadeep, Caron, James Eugene, Holland, John Patrick, Marakhtanov, Alexei M, Kozakevich, Felix Leib, Ji, Bing
Year of Publication 03.08.2023
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Year of Publication 03.08.2023
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DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY
Bhowmick, Ranadeep, Holland, John P, Marakhtanov, Alexei M, Kozakevich, Felix Leib, Ji, Bing
Year of Publication 06.07.2023
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Year of Publication 06.07.2023
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SYSTEMS AND METHODS FOR CONTROLLING A PULSE WIDTH OF A SQUARE PULSE WAVEFORM
MARAKHTANOV, Alexei M, ZHAO, Lin, HOLLAND, John P, LUCCHESI, Kenneth, HUDSON, Eric A, KIM, Bongseong, BELAU, Leonid
Year of Publication 02.05.2024
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Year of Publication 02.05.2024
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PLASMA DISCHARGE UNIFORMITY CONTROL USING MAGNETIC FIELDS
Panagopoulos, Theodoros, Holland, John P, Marakhtanov, Alexei M, Ji, Bing, Paeng, Dong Woo, de la Llera, Anthony
Year of Publication 17.08.2023
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Year of Publication 17.08.2023
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PLASMA DISCHARGE UNIFORMITY CONTROL USING MAGNETIC FIELDS
MARAKHTANOV, Alexei M, DE LA LLERA, Anthony, JI, Bing, HOLLAND, John P, PAENG, Dong Woo, PANAGOPOULOS, Theodoros
Year of Publication 24.03.2022
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Year of Publication 24.03.2022
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Plasma discharge uniformity control using magnetic field
MARAKHTANOV ALEXEI M, DE LA LLERA ANTHONY, PENG DONGYU, THEODOROS. PANAGOPULUS, JI BING, HOLLAND JOHN P
Year of Publication 26.05.2023
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Year of Publication 26.05.2023
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