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Conductive Feature Formation and Structure

by TSAI MING HSING, WANG YU SHIH, LIN WEI JUNG, CHANG KEN YU, TSAI CHUN I, MAO SHIAN WEI
Year of Publication 10.06.2019

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FinFET device with T-shaped fin

by Lin, Chun-Neng, Mao, Shian-Wei
Year of Publication 06.04.2021

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FINFET DEVICE WITH T-SHAPED FIN

by MAO, Shian-Wei, LIN, Chun-Neng
Year of Publication 07.05.2020

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Conductive feature formation and structure

by Tsai, Ming-Hsing, Tsai, Chun-I, Lin, Wei-Jung, Wang, Yu Shih, Chang, Ken-Yu, Mao, Shian Wei
Year of Publication 25.06.2024

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FinFET device with T-shaped fin and method for forming the same

by Lin, Chun-Neng, Mao, Shian-Wei
Year of Publication 31.12.2019

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FINFET DEVICE WITH T-SHAPED FIN AND METHOD FOR FORMING THE SAME

by MAO, Shian-Wei, LIN, Chun-Neng
Year of Publication 26.12.2019

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Wet Cleaning with Tunable Metal Recess for Via Plugs

by Huang, Kuo-Bin, Wang, Yu Shih, Mao, Shian Wei, Yeh, Ming-Hsi
Year of Publication 25.05.2023

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Wet cleaning with tunable metal recess for via plugs

by Huang, Kuo-Bin, Wang, Yu Shih, Mao, Shian Wei, Yeh, Ming-Hsi
Year of Publication 17.01.2023

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Conductive Feature Formation and Structure

by Tsai, Ming-Hsing, Tsai, Chun-I, Lin, Wei-Jung, Wang, Yu Shih, Chang, Ken-Yu, Mao, Shian Wei
Year of Publication 16.11.2023

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Conductive feature formation and structure

by Tsai, Ming-Hsing, Tsai, Chun-I, Lin, Wei-Jung, Wang, Yu Shih, Chang, Ken-Yu, Mao, Shian Wei
Year of Publication 24.10.2023

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Wet Cleaning with Tunable Metal Recess for Via Plugs

by Huang, Kuo-Bin, Wang, Yu Shih, Mao, Shian Wei, Yeh, Ming-Hsi
Year of Publication 06.05.2021

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Wet cleaning with tunable metal recess for VIA plugs

by Huang, Kuo-Bin, Wang, Yu Shih, Mao, Shian Wei, Yeh, Ming-Hsi
Year of Publication 15.12.2020

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Conductive Feature Formation and Structure

by Tsai, Ming-Hsing, Tsai, Chun-I, Lin, Wei-Jung, Wang, Yu Shih, Chang, Ken-Yu, Mao, Shian Wei
Year of Publication 22.07.2021

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Conductive feature formation and structure

by Tsai, Ming-Hsing, Tsai, Chun-I, Lin, Wei-Jung, Wang, Yu Shih, Chang, Ken-Yu, Mao, Shian Wei
Year of Publication 06.04.2021

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Wet Cleaning with Tunable Metal Recess for VIA Plugs

by Huang, Kuo-Bin, Wang, Yu Shih, Mao, Shian Wei, Yeh, Ming-Hsi
Year of Publication 03.10.2019

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Conductive feature formation and structure

by Tsai, Ming-Hsing, Tsai, Chun-I, Lin, Wei-Jung, Wang, Yu Shih, Chang, Ken-Yu, Mao, Shian Wei
Year of Publication 23.07.2019

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CONDUCTIVE FEATURE FORMATION AND STRUCTURE

by WANG, Yu Shih, MAO, Shian Wei, TSAI, Ming-Hsing, TSAI, Chun-I, LIN, Wei-Jung, CHANG, Ken-Yu
Year of Publication 30.05.2019

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Conductive Feature Formation and Structure

by Tsai, Ming-Hsing, Tsai, Chun-I, Lin, Wei-Jung, Wang, Yu Shih, Chang, Ken-Yu, Mao, Shian Wei
Year of Publication 30.05.2019

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Bildung und Struktur leitfähiger Merkmale

by Tsai, Ming-Hsing, Tsai, Chun-I, Lin, Wei-Jung, Wang, Yu Shih, Chang, Ken-Yu, Mao, Shian Wei
Year of Publication 15.06.2023

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Semiconductor device and method for forming the same

by MAO, SHIAN WEI, YEH, MING HSI, WANG, YU SHIH, HUANG, KUO BIN
Year of Publication 21.06.2021

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