Method for three-dimensionally measuring a 3D aerial image of a lithography mask
Husemann, Christoph, Ruoff, Johannes, Mann, Hans-Jürgen, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 28.04.2020
Get full text
Year of Publication 28.04.2020
Patent
Imaging optical unit for a metrology system for examining a lithography mask
Beder, Susanne, Ruoff, Johannes, Neumann, Jens Timo, Mann, Hans-Jürgen, Müller, Ralf, Matejka, Ulrich
Year of Publication 31.03.2020
Get full text
Year of Publication 31.03.2020
Patent
IMAGING OPTICS
MANN, Hans-Jürgen, SHAFER, David, ENDRES, Martin, WARM, Berndt, HERKOMMER, Alois
Year of Publication 07.08.2019
Get full text
Year of Publication 07.08.2019
Patent
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LITHOGRAPHY MASK
Husemann, Christoph, Ruoff, Johannes, Mann, Hans-Jürgen, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 13.12.2018
Get full text
Year of Publication 13.12.2018
Patent
Method for three-dimensionally measuring a 3D aerial image of a lithography mask
Husemann, Christoph, Ruoff, Johannes, Mann, Hans-Jürgen, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 04.09.2018
Get full text
Year of Publication 04.09.2018
Patent