Search Results - "MANN, HANS-JÜRGEN" :: K.UTB vyhledávací portál

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Stochastic mechanics and nonlinear schrödinger equation

by Mann, Hans-Jürgen
Published in Reports on mathematical physics (01.08.1999)

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Journal Article

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IMAGING OPTICAL SYSTEM

by Mann, Hans-Jürgen
Year of Publication 21.08.2024

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Patent

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IMAGING OPTICAL SYSTEM

by Mann, Hans-Jürgen
Year of Publication 12.10.2022

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Patent

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IMAGING OPTICAL SYSTEM

by MANN, Hans-Jürgen
Year of Publication 29.06.2022

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Patent

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IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE INSTALLATION FOR MICROLITHOGRAPHY WITH AN IMAGING OPTICAL SYSTEM OF THIS TYPE

by MANN, Hans-Jürgen, EPPLE, Alexander
Year of Publication 02.12.2020

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Patent

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Projection lens and projection illumination system with negative back focus of the entrance pupil

by Mann, Hans-Jürgen, Singer, Wolfgang
Year of Publication 16.05.2018

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Patent

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IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS THEREWITH

by MANN, HANS-JÜRGEN
Year of Publication 11.05.2016

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Patent

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MAGNIFYING IMAGING OPTICAL UNIT AND EUV MASK INSPECTION SYSTEM WITH SUCH AN IMAGING OPTICAL UNIT

by MANN, HANS-JÜRGEN
Year of Publication 18.09.2014

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Patent

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IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE INSTALLATION FOR MICRO-LITHOGRAPHY WITH AN IMAGING OPTICAL SYSTEM OF THIS TYPE

by MANN, HANS-JÜRGEN
Year of Publication 14.05.2014

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Patent

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Illumination optics for a metrology system for examining an object using EUV illumination light and metrology system comprising an illumination optics of this type

by MANN HANS-JÜRGEN, HERKOMMER ALOIS
Year of Publication 18.08.2015

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Patent

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PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY

by MANN, Hans-Jürgen, ENDRES, Martin, ZELLNER, Johannes
Year of Publication 26.04.2017

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Patent

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IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS THEREWITH

by MANN, HANS-JÜRGEN
Year of Publication 12.12.2012

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Patent

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Method for three-dimensionally measuring a 3D aerial image of a lithography mask

by Husemann, Christoph, Ruoff, Johannes, Mann, Hans-Jürgen, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 28.04.2020

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Patent

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Imaging optical unit for a metrology system for examining a lithography mask

by Beder, Susanne, Ruoff, Johannes, Neumann, Jens Timo, Mann, Hans-Jürgen, Müller, Ralf, Matejka, Ulrich
Year of Publication 31.03.2020

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Patent

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Optical system

by ZELLNER, JOHANNES, MANN, HANS-JÜRGEN, ENDRES, MARTIN
Year of Publication 13.04.2016

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Patent

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IMAGING OPTICS

by MANN, Hans-Jürgen, SHAFER, David, ENDRES, Martin, WARM, Berndt, HERKOMMER, Alois
Year of Publication 07.08.2019

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Patent

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METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LITHOGRAPHY MASK

by Husemann, Christoph, Ruoff, Johannes, Mann, Hans-Jürgen, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 13.12.2018

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Patent

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Method for three-dimensionally measuring a 3D aerial image of a lithography mask

by Husemann, Christoph, Ruoff, Johannes, Mann, Hans-Jürgen, Matejka, Ulrich, Perlitz, Sascha
Year of Publication 04.09.2018

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Patent

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Optische Abbildungseinrichtung, Mikroskop und Abbildungsverfahren für die Mikroskopie

by Feldmann, Heiko, Mann, Hans-Jürgen
Year of Publication 05.04.2018

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Patent

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Vergrößernde abbildende Optik sowie EUV-Maskeninspektionssystem mit einer derartigen abbildenden Optik

by MANN, HANS-JÜRGEN
Year of Publication 04.02.2016

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Patent

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