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Year of Publication 09.04.2020
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Year of Publication 09.04.2020
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Process window discovery, expansion and control of design hotspots susceptible to overlay failures
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Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding
디바이스 검사 시스템을 사용한 오버레이 에러의 측정
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Year of Publication 13.07.2020
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Year of Publication 13.07.2020
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Gan-on-Si process defect detection and analysis for HB-LEDs and power devices
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Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
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Conference Proceeding
Detection, binning, and analysis of defects in a GaN-on-Si process for High Brightness Light Emitting Diode's
Halder, S., Miller, A., Osman, H., Dutta, B., Mani, A., Jones, C., McCance, S., Burkeen, F.
Published in 2012 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2012)
Published in 2012 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2012)
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Conference Proceeding
Measurement of overlay error using device inspection system
Hoo, Choon Hoong, Mani, Antonio, Shchegrov, Andrei, Manassen, Amnon, Yerushalmi, Liran, Park, Allen, Pandev, Stilian, Ji, Fangren, Madsen, Jon
Year of Publication 10.10.2023
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Year of Publication 10.10.2023
Patent
Identifying nuisances and defects of interest in defects detected on a wafer
Sah, Kaushik, Mani, Antonio, VonDenHoff, Mike, Cross, Andrew, Duffy, Brian, Plihal, Martin
Year of Publication 30.06.2020
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Year of Publication 30.06.2020
Patent
Measurement of Overlay Error Using Device Inspection System
Hoo, Choon Hoong, Mani, Antonio, Shchegrov, Andrei, Manassen, Amnon, Yerushalmi, Liran, Park, Allen, Pandev, Stilian, Ji, Fangren, Madsen, Jon
Year of Publication 27.05.2021
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Year of Publication 27.05.2021
Patent
Measurement of overlay error using device inspection system
Hoo, Choon Hoong, Mani, Antonio, Shchegrov, Andrei, Manassen, Amnon, Yerushalmi, Liran, Park, Allen, Pandev, Stilian, Ji, Fangren, Madsen, Jon
Year of Publication 09.03.2021
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Year of Publication 09.03.2021
Patent
IDENTIFYING NUISANCES AND DEFECTS OF INTEREST IN DEFECTS DETECTED ON A WAFER
VON DEN HOFF, Mike, PLIHAL, Martin, SAH, Kaushik, CROSS, Andrew, MANI, Antonio, DUFFY, Brian
Year of Publication 07.03.2019
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Year of Publication 07.03.2019
Patent
Identifying Nuisances and Defects of Interest in Defects Detected on a Wafer
Sah, Kaushik, Mani, Antonio, VonDenHoff, Mike, Cross, Andrew, Duffy, Brian, Plihal, Martin
Year of Publication 28.02.2019
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Year of Publication 28.02.2019
Patent
Measurement of Overlay Error Using Device Inspection System
Hoo, Choon Hoong, Mani, Antonio, Shchegrov, Andrei, Manassen, Amnon, Yerushalmi, Liran, Park, Allen, Pandev, Stilian, Ji, Fangren, Madsen, Jon
Year of Publication 15.08.2019
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Year of Publication 15.08.2019
Patent
MEASUREMENT OF OVERLAY ERROR USING DEVICE INSPECTION SYSTEM
HOO, George (Choon), PARK, Allen, MADSEN, Jon, MANI, Antonio, PANDEV, Stilian, MANASSEN, Amnon, SHCHEGROV, Andrei, YERUSHALMI, Liran, JI, Fangren
Year of Publication 06.06.2019
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Year of Publication 06.06.2019
Patent