Search Results - "MANGER, Matthias" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

조작 가능한 광학 모듈을 교정하는 방법

조작 가능한 광학 모듈을 교정하는 방법

by CHRIST REGINA, MANGER MATTHIAS
Year of Publication 30.07.2024

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Patent

마이크로리소그래피용 적응형 광학 요소

마이크로리소그래피용 적응형 광학 요소

by VOGLER ALEXANDER, MANGER MATTHIAS, RAAB MARKUS
Year of Publication 08.05.2023

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Patent

광학 장치, 목표 변형을 설정하기 위한 방법, 및 리소그래피 시스템

광학 장치, 목표 변형을 설정하기 위한 방법, 및 리소그래피 시스템

by HELLER PASCAL, KOENIGER ANDREAS, GWOSCH KLAUS, MANGER MATTHIAS
Year of Publication 01.02.2024

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Patent

구동 디바이스, 광학 시스템 및 리소그래피 장치

구동 디바이스, 광학 시스템 및 리소그래피 장치

by AWAD MOHAMMAD, MANGER MATTHIAS, BERGER LARS, ALIMAN MICHEL
Year of Publication 06.01.2023

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Patent

구성요소의 위치의 주파수 기반 결정을 위한 측정 조립체

구성요소의 위치의 주파수 기반 결정을 위한 측정 조립체

by KOENIGER ANDREAS, VOGLER ALEXANDER, MANGER MATTHIAS
Year of Publication 23.12.2020

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Patent

Module for a projection exposure apparatus, method, and projection exposure apparatus

Module for a projection exposure apparatus, method, and projection exposure apparatus

by MANGER, Matthias
Year of Publication 25.07.2024

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Patent

투영 노광 장치의 반사 광학 요소를 제조하기 위한 방법 및 투영 노광 장치용 반사 광학 요소, 투영 렌즈 및 투영 노광 장치

투영 노광 장치의 반사 광학 요소를 제조하기 위한 방법 및 투영 노광 장치용 반사 광학 요소, 투영 렌즈 및 투영 노광 장치

by BEZOLD STEFFEN, MANGER MATTHIAS, PETRI CHRISTOPH, ALEXEEV PAVEL, KAES MATTHIAS, PAULS WALTER
Year of Publication 17.03.2021

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Patent

METHOD FOR CALIBRATING A MANIPULABLE OPTICAL MODULE

METHOD FOR CALIBRATING A MANIPULABLE OPTICAL MODULE

by MANGER, Matthias, CHRIST, Regina
Year of Publication 16.10.2024

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Patent

METHOD FOR CALIBRATING A MANIPULABLE OPTICAL MODULE

METHOD FOR CALIBRATING A MANIPULABLE OPTICAL MODULE

by Manger, Matthias, Christ, Regina
Year of Publication 26.09.2024

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Patent

Beam propagation camera and method for light beam analysis

Beam propagation camera and method for light beam analysis

by Manger, Matthias
Year of Publication 24.08.2021

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Patent

BEAM PROPAGATION CAMERA AND METHOD FOR LIGHT BEAM ANALYSIS

BEAM PROPAGATION CAMERA AND METHOD FOR LIGHT BEAM ANALYSIS

by MANGER, Matthias
Year of Publication 24.03.2021

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Patent

Sistema y procedimiento para analizar un haz de luz guiado por una óptica de guía de haz

Sistema y procedimiento para analizar un haz de luz guiado por una óptica de guía de haz

by MANGER, Matthias, BAUMER, Florian
Year of Publication 12.03.2024

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Patent

Metrology system and method for measuring an excitation laser beam in an EUV plasma source

Metrology system and method for measuring an excitation laser beam in an EUV plasma source

by Manger, Matthias, Baumer, Florian
Year of Publication 05.03.2024

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Patent

SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT

SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT

by BAUMER, FLORIAN, MANGER, MATTHIAS
Year of Publication 26.02.2024

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Patent

METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM IN AN EUV PLASMA SOURCE

METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM IN AN EUV PLASMA SOURCE

by MANGER, Matthias, BAUMER, Florian
Year of Publication 14.02.2024

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Patent

EUV 투영 노광 시스템용 조명 시스템을 제조하기 위한 방법, 및 조명 시스템

EUV 투영 노광 시스템용 조명 시스템을 제조하기 위한 방법, 및 조명 시스템

by BAIER JUERGEN, MUELLER ULRICH, WELKER JOACHIM, ORTHEN ANDRE, HOLZ MARKUS, MANGER MATTHIAS, RUNDE DANIEL, LICHTENTHAELER JOERG, HOLDERER HUBERT
Year of Publication 16.11.2018

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Patent

METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM IN AN EUV PLASMA SOURCE

METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM IN AN EUV PLASMA SOURCE

by MANGER, Matthias, BAUMER, Florian
Year of Publication 29.11.2023

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Patent

SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT

SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT

by MANGER, Matthias, BAUMER, Florian
Year of Publication 25.10.2023

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Patent

Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit

Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit

by Manger, Matthias, Baumer, Florian
Year of Publication 22.08.2023

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Patent

SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT

SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT

by MANGER, Matthias, BAUMER, Florian
Year of Publication 09.08.2023

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Patent

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