APPARATUS FOR TRANSPORTING STRIP-LIKE MATERIAL
KAMMER MANFRED, GROSS HARALD, DEUS CARSTEN, OTTO FALK, GOTTSMANN LUTZ
Year of Publication 16.08.2012
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Year of Publication 16.08.2012
Patent
Substrate's temperature measuring method for vacuum deposition system, involves continuously calibrating pyrometers for determining temperature of substrate at different points on vacuum chamber
KAMMER, MANFRED, STEUER, CHRISTOPH, SENS, MARTIN, WENZEL, BERND-DIETER
Year of Publication 17.12.2009
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Year of Publication 17.12.2009
Patent
Electrode arrangement for plasma-supported, magnetically-guided deposition or removal of thin layers on/from substrate surface in vacuum, has insulated element arranged in intermediate space between bases of backplate electrode and screen
KAMMER, MANFRED, STEUER, CHRISTOPH, SENS, MARTIN, WENZEL, BERND-DIETER
Year of Publication 19.11.2009
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Year of Publication 19.11.2009
Patent
Verfahren zur Temperaturmessung an Substraten und Vakuumbeschichtungsanlage
KAMMER, MANFRED, STEUER, CHRISTOPH, SENS, MARTIN, WENZEL, BERND-DIETER
Year of Publication 16.05.2013
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Year of Publication 16.05.2013
Patent
Verfahren zur Temperaturmessung an Substraten und Vakuumbeschichtungsanlage
KAMMER, MANFRED, STEUER, CHRISTOPH, SENS, MARTIN, WENZEL, BERND-DIETER
Year of Publication 25.04.2013
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Year of Publication 25.04.2013
Patent
Elektrodenanordnung für magnetfeldgeführte plasmagestützte Prozesse im Vakuum
KAMMER, MANFRED, STEUER, CHRISTOPH, SENS, MARTIN, WENZEL, BERND-DIETER
Year of Publication 28.06.2012
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Year of Publication 28.06.2012
Patent