SIB 막들을 증착하기 위한 프로세스들
MALLICK ABHIJIT B, QI BO, KOSHIZAWA TAKEHITO, JANAKIRAMAN KARTHIK, AYDIN AYKUT, CHENG RUI
Year of Publication 22.02.2024
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Year of Publication 22.02.2024
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패터닝 애플리케이션들을 위한 고밀도 탄소 막들
VENKATASUBRAMANIAN ESWARANAND, GOTTHEIM SAMUEL E, MALLICK ABHIJIT B, MANNA PRAMIT
Year of Publication 07.06.2021
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Year of Publication 07.06.2021
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박막의 응력을 완화시키기 위한 인-시튜 고전력 주입
VENKATASUBRAMANIAN ESWARANAND, MALLICK ABHIJIT B, GANDIKOTA SRINIVAS, MANNA PRAMIT
Year of Publication 02.02.2021
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Year of Publication 02.02.2021
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회전식 자기 하우징을 이용하는 튜닝가능 균일성 제어
GOTTHEIM SAMUEL E, VENKATASUBRAMANIAN ESWARANAND, HAYWOOD EDWARD, MALLICK ABHIJIT B, GARNER STEPHEN C, FRANKLIN TIMOTHY JOSEPH, MANNA PRAMIT
Year of Publication 14.04.2022
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Year of Publication 14.04.2022
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패터닝된 금속 산화물 포토레지스트들의 선량 감소
DIEHL DANIEL LEE, RAMALINGAM JOTHILINGAM, MALLICK ABHIJIT B, YAN LIFAN, HWANG HO YUNG, SINGH TEJINDER
Year of Publication 24.03.2022
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Year of Publication 24.03.2022
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METHODS AND APPARATUS FOR SELECTIVE ETCH STOP CAPPING AND SELECTIVE VIA OPEN FOR FULLY LANDED VIA ON UNDERLYING METAL
SALY MARK JOSEPH, MALLICK ABHIJIT B, PARIKH SUKETU, THOMPSON DAVID, DANGERFIELD AARON MICHAEL, LI NING, BALSEANU MICHAELA A, BHUYAN BHASKAR JYOTI
Year of Publication 17.01.2023
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Year of Publication 17.01.2023
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기판 프로세싱 챔버
VENKATASUBRAMANIAN ESWARANAND, HAYWOOD EDWARD, MALLICK ABHIJIT B, WONG CARLATON, GARNER STEPHEN C, FISCHBACH ADAM, FRANKLIN TIMOTHY JOSEPH, MANNA PRAMIT
Year of Publication 03.01.2022
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Year of Publication 03.01.2022
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플라즈마 결합 재료들을 최적화하는 것에 의한 막 특성들의 조절
FRANKLIN TIMOTHY J, VENKATASUBRAMANIAN ESWARANAND, GOTTHEIM SAMUEL E, MALLICK ABHIJIT B, FISCHBACH ADAM, HAYWOOD EDWARD L, MANNA PRAMIT, CHUC KIEN N
Year of Publication 24.03.2022
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Year of Publication 24.03.2022
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패터닝된 그리고 패터닝되지 않은 기판들 상의 순차적 증착 및 증착된 막의 고주파 플라즈마 처리
YU HANG, LI CHANGLING, BALSEANU MIHAELA A, SALY MARK JOSEPH, KAMATH SANJAY G, DURAND WILLIAM JOHN, MALLICK ABHIJIT B, CHUA THAI CHENG, KRAUS PHILIP ALLAN, VATS VINAYAK VEER, KALUTARAGE LAKMAL CHARIDU, PADHI DEENESH
Year of Publication 06.07.2021
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Year of Publication 06.07.2021
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MIDDLE OF LINE DIELECTRIC LAYER ENGINEERING FOR VIA VOID PREVENTION
BREIL, Nicolas Louis, PRANATHARTHIHARAN, Balasubramanian, MALLICK, Abhijit B
Year of Publication 28.03.2024
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Year of Publication 28.03.2024
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MIDDLE OF LINE DIELECTRIC LAYER ENGINEERING FOR VIA VOID PREVENTION
BREIL, Nicolas Louis, PRANATHARTHIHARAN, Balasubramanian, MALLICK, Abhijit B
Year of Publication 28.03.2024
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Year of Publication 28.03.2024
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MIDDLE OF LINE DIELECTRIC LAYER ENGINEERING FOR VIA VOID PREVENTION
BREIL, Nicolas Louis, PRANATHARTHIHARAN, Balasubramanian, MALLICK, Abhijit B
Year of Publication 28.03.2024
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Year of Publication 28.03.2024
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HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS
VENKATASUBRAMANIAN, Eswaranand, MANNA, Pramit, GOTTHEIM, Samuel E, MALLICK, Abhijit B
Year of Publication 14.03.2024
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Year of Publication 14.03.2024
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In-situ high power implant to relieve stress of a thin film
Venkatasubramanian, Eswaranand, Mallick, Abhijit B, Manna, Pramit, Gandikota, Srinivas
Year of Publication 17.01.2023
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Year of Publication 17.01.2023
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