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Year of Publication 06.07.2023
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Year of Publication 20.03.2019
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Substrate processing system and transfer method including a vacuum transfer module, a plasma processing module connected to the vacuum transfer module, and a controller
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Year of Publication 16.09.2022
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Electrostatic chuck apparatus
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Year of Publication 01.08.2017
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ELECTROSTATIC CHUCK APPARATUS
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Year of Publication 25.06.2015
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Year of Publication 25.06.2015
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