Investigation of amorphous hydrogenated carbon layers as sacrificial structures for MEMS applications
Roth, Andre, Kautzsch, Thoralf, Vogt, Mirko, Stegemann, Maik, Frohlich, Heiko, Breitkopf, Cornelia
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
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Conference Proceeding
Methods for manufacturing a MOSFET
Pippan, Manfred, Stegemann, Maik, Jantscher, Wolfgang, Riegler, Andreas
Year of Publication 03.01.2023
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Year of Publication 03.01.2023
Patent
Pressure Sensing Device
Boitier-Mahlberg, Anne, Stegemann, Maik, Vogt, Mirko, Müller, Marco, Haubold, Marco, Förster, Anita
Year of Publication 19.10.2023
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Year of Publication 19.10.2023
Patent
PRESSURE SENSING DEVICE
BOITIER-MAHLBERG, Anne, HAUBOLD, Marco, FOERSTER, Anita, STEGEMANN, Maik, MUELLER, Marco, VOGT, Mirko
Year of Publication 18.10.2023
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Year of Publication 18.10.2023
Patent
Methods for Manufacturing a MOSFET
Pippan, Manfred, Stegemann, Maik, Jantscher, Wolfgang, Riegler, Andreas
Year of Publication 20.05.2021
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Year of Publication 20.05.2021
Patent
Methods for manufacturing a MOSFET
Pippan, Manfred, Stegemann, Maik, Jantscher, Wolfgang, Riegler, Andreas
Year of Publication 26.01.2021
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Year of Publication 26.01.2021
Patent
Producing a buried cavity in a semiconductor substrate
Stegemann, Maik, Kautzsch, Thoralf, Rudolph, Uwe, Vogt, Mirko, Binder, Boris, Roeth, Andre
Year of Publication 19.07.2022
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Year of Publication 19.07.2022
Patent
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
Stegemann, Maik, Kautzsch, Thoralf, Froehlich, Heiko, Vogt, Mirko, Bieselt, Steffen, Roeth, Andre
Year of Publication 03.08.2021
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Year of Publication 03.08.2021
Patent
Emitter and method for manufacturing the same
Stegemann, Maik, Kautzsch, Thoralf, Froehlich, Heiko, Vogt, Mirko, Bieselt, Steffen
Year of Publication 14.05.2019
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Year of Publication 14.05.2019
Patent