Search Results - "MAIK STEGEMANN" :: K.UTB vyhledávací portál

Loading…

Method of processing organic antireflection layers

by Wege, Stephan, Richter, Harald, Stegemann, Maik
Year of Publication 31.01.2002

Get full text

Patent

Loading…

Method of processing organic antireflection layers

by WEGE STEPHAN, STEGEMANN MAIK, RICHTER HARALD
Year of Publication 31.01.2002

Get full text

Patent

Loading…

Method of anisotropic dry etching organic antireflection layers

by STEGEMANN, MAIK, WEGE, STEPHAN, RICHTER, HARALD
Year of Publication 30.01.2002

Get full text

Patent

Loading…

Verfahren zur Herstellung von Gräben für DRAM Zellanordnungen

by STEGEMANN, MAIK, BRENCHER, LOTHAR, RUDOLPH, UWE
Year of Publication 06.12.2001

Get full text

Patent

Loading…

Sensorstrukturen, -systeme und -verfahren mit verbesserter Integration und optimierter Standfläche

by STEGEMANN, MAIK, BINDER, BORIS, KAUTZSCH, THORALF, FROEHLICH, HEIKO, VOGT, MIRKO, WINKLER, BERNHARD, ROEHT, ANDRE
Year of Publication 06.08.2015

Get full text

Patent

Loading…

Method for producing trenches for DRAM cell configurations

by Brencher, Lothar, Stegemann, Maik, Rudolph, Uwe
Year of Publication 25.10.2001

Get full text

Patent

Loading…

Method for producing trenches for DRAM cell configurations

by RUDOLPH UWE, STEGEMANN MAIK, BRENCHER LOTHAR
Year of Publication 25.10.2001

Get full text

Patent

Loading…

Production of trenches comprises applying mask layers to a semiconductor wafer, applying a lacquer mask to one mask layer, structuring the recesses in the mask layer and structuring recesses in the other mask layer

by STEGEMANN, MAIK, BRENCHER, LOTHAR, RUDOLPH, UWE
Year of Publication 12.07.2001

Get full text

Patent

Loading…

METHOD FOR THE PRODUCTION OF A SEMICONDUCTOR DEVICE

by STEGEMANN, MAIK, ROGALLI, MICHAEL, REB, ALEXANDER, VOELKEL, LARS
Year of Publication 15.06.2005

Get full text

Patent

Loading…

Process for the production of a semiconductor apparatus

by STEGEMANN, MAIK, ROGALLI, MICHAEL, REB, ALEXANDER, VOELKEL, LARS
Year of Publication 01.05.2005

Get full text

Patent

Loading…

Method for the production of a semiconductor device

by ROGALLI MICHAEL, VOLKEL LARS, STEGEMANN MAIK, REB ALEXANDER
Year of Publication 28.04.2005

Get full text

Patent

Loading…

Verfahren zum Herstellen einer Halbleiterstruktur

by STEGEMANN, MAIK, WEGE, STEPHAN
Year of Publication 07.10.2004

Get full text

Patent

Loading…

Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process

by KIRCHHOFF MARKUS, WEGE STEPHAN, VOGT MIRKO, STEGEMANN MAIK, CZECH GUENTHER, FUELBER CARSTEN
Year of Publication 06.05.2008

Get full text

Patent

Loading…

Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process

by Czech, Guenther, Fuelber, Carsten, Kirchhoff, Markus, Stegemann, Maik, Vogt, Mirko, Wege, Stephan
Year of Publication 06.05.2008

Get full text

Patent

Loading…

ETCHING GAS AND METHOD FOR DRY ETCHING

by STEGEMANN, MAIK, WEGE, STEPHAN
Year of Publication 12.02.2004

Get full text

Patent

Loading…

Etching gas and process for dry etching

by STEGEMANN, MAIK, WEGE, STEPHAN
Year of Publication 16.01.2004

Get full text

Patent

Loading…

Ätzgas und Verfahren zum Trockenätzen

by STEGEMANN, MAIK, WEGE, STEFAN
Year of Publication 04.12.2003

Get full text

Patent

Loading…

ETCHING GAS AND METHOD FOR DRY ETCHING

by STEGEMANN, MAIK, WEGE, STEPHAN
Year of Publication 04.12.2003

Get full text

Patent

Loading…

Method for photolithographic structuring by means of a carbon hard mask layer which has a diamond-like hardness and is produced by means of a plasma-enhanced deposition method

by STEGEMANN, MAIK, VOGT, MIRKO, FUELBER, CARSTEN, KIRCHHOFF, MARKUS, CZECH, GUENTHER
Year of Publication 11.04.2004

Get full text

Patent

Loading…

Mikroelektromechanische Resonatoren

by STEGEMANN, MAIK, FROEHLICH, HEIKO, KAUTZSCH, THORALF, SANTA, THOMAS, VOGT, MIRKO, BURIAN, MARKUS
Year of Publication 18.09.2014

Get full text

Patent

Refine Results

Format

Subject Area

Topic

Language

Year of Publication

Database