Method for photolithographic structuring by means of a carbon hard mask layer which has a diamond-like hardness and is produced by means of a plasma-enhanced deposition method
STEGEMANN, MAIK, VOGT, MIRKO, FUELBER, CARSTEN, KIRCHHOFF, MARKUS, CZECH, GUENTHER
Year of Publication 11.04.2004
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Year of Publication 11.04.2004
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Mikroelektromechanische Resonatoren
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Year of Publication 18.09.2014
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Year of Publication 18.09.2014
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