SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
HORIKAWA Tomu, TAKEHARA Masahiko, KONDO Yoshie, MAETO Keisuke, MIYAMOTO Hiroshi, NAKAZAWA Tatsuya, OGAWA Kohei, HOSOI Takuya, YAMADA Takashi, KIMURA Saori
Year of Publication 29.08.2024
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Year of Publication 29.08.2024
Patent