기판 프로세싱 챔버 내 시일 벤팅 (seal venting)
PIOUX GABRIEL, HAN HUI LING, MADSEN STEVEN JAMES, KINSLER MICHAEL JULIUS
Year of Publication 13.03.2023
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Year of Publication 13.03.2023
Patent
NIMG-76. SURFACE-ENHANCED RAMAN SPECTROSCOPY (SERS) FOR INTRAOPERATIVE BRAIN TUMOR IMAGING AND PHOTOTHERMAL THERAPY
Arami, Hamed, Chang, Edwin, Patel, Chirag B, Madsen, Steven James, Davis, Ryan Miller, Sinclair, Robert, Gambhir, Sanjiv S
Published in Neuro-oncology (Charlottesville, Va.) (06.11.2017)
Published in Neuro-oncology (Charlottesville, Va.) (06.11.2017)
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Journal Article
SEAL VENTING IN A SUBSTRATE PROCESSING CHAMBER
Han, Hui Ling, Kinsler, Michael Julius, Pioux, Gabriel, Madsen, Steven James
Year of Publication 10.08.2023
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Year of Publication 10.08.2023
Patent
SEAL VENTING IN A SUBSTRATE PROCESSING CHAMBER
HAN, Hui Ling, MADSEN, Steven James, PIOUX, Gabriel, KINSLER, Michael Julius
Year of Publication 20.01.2022
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Year of Publication 20.01.2022
Patent
Seal venting in a substrate processing chamber
PIOUX, GABRIEL, KINSLER, MICHAEL JULIUS, HAN, HUI-LING, MADSEN, STEVEN JAMES
Year of Publication 16.05.2022
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Year of Publication 16.05.2022
Patent