Investigation on critical thickness dependence of ALD TiN diffusion barrier in MOL
Subramaniyan, Archana, Luppi, Domingo Ferrer, Makela, Neal, Bauer, Lawrence, Madan, Anita, Murphy, Richard, Baumann, Frieder, Kohli, Kriti, Parks, Christopher
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Low-Temperature Oxide Wafer Bonding for 3-D Integration: Chemistry of Bulk Oxide Matters
Wei Lin, Shi, Leathen, Yiping Yao, Madan, Anita, Pinto, Teresa, Zavolas, Nick, Murphy, Richard, Skordas, Spyridon, Iyer, Subramanian
Published in IEEE transactions on semiconductor manufacturing (01.08.2014)
Published in IEEE transactions on semiconductor manufacturing (01.08.2014)
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Journal Article
Practical Considerations in Quantitative Nanoscale Energy-Dispersive X-ray Spectroscopy (EDX) and Its Application in SiGe
Weng, Weihao, Baumann, Frieder H., Ke, Yue, Loesing, Rainer, Madan, Anita, Zhu, Zhengmao, Katnani, Ahmad D.
Published in Microscopy and microanalysis (01.08.2015)
Published in Microscopy and microanalysis (01.08.2015)
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Journal Article
Case report on effective cardiopulmonary resuscitation in a pregnant woman
Sharan, Radhe, Madan, Anita, Makkar, Vega, Attri, Joginder Pal
Published in Anesthesia, essays and researches (01.01.2016)
Published in Anesthesia, essays and researches (01.01.2016)
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Journal Article
SIMS quantification of SiGe composition with low-energy ion beams
Zhu, Zhengmao, Ronsheim, Paul, Turansky, Andrew, Hatzistergos, Michael, Madan, Anita, Pinto, Teresa, Holt, Judson, Reznicek, Alexander
Published in Surface and interface analysis (01.01.2011)
Published in Surface and interface analysis (01.01.2011)
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Journal Article
Conference Proceeding
ALD TaN Barrier for Enhanced Performance with Low Contact Resistance for 14nm Technology Node Cu Interconnects
Nag, Joyeeta, Cohen, Brian, Choi, Samuel, Ogino, Atsushi, Oh, Minseok, Yan, Yan, Liang, Jim, Christiansen, Cathryn, Kim, Andrew, Li, Baozhen, DeHaven, Patrick, Madan, Anita, Krishnan, Siddarth, Simon, Andrew H
Published in ECS transactions (10.09.2015)
Published in ECS transactions (10.09.2015)
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Journal Article
Do tests of executive functioning predict ability to down-regulate emotions spontaneously and when instructed to suppress?
Gyurak, Anett, Goodkind, Madeleine S., Madan, Anita, Kramer, Joel H., Miller, Bruce L., Levenson, Robert W.
Published in Cognitive, affective, & behavioral neuroscience (01.06.2009)
Published in Cognitive, affective, & behavioral neuroscience (01.06.2009)
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Journal Article
Atomic Layer Deposition of Sidewall Spacers: Process, Equipment and Integration Challenges in State-of-the-Art Logic Technologies
Belyansky, Michael P., Conti, Richard, Khan, Shahrukh, Zhou, Xin, Klymko, Nancy R, Yao, Yiping, Madan, Anita, Tai, Leo, Flaitz, Philip, Ando, Takashi
Published in ECS transactions (26.03.2014)
Published in ECS transactions (26.03.2014)
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Journal Article
Ultrathin (8-14 nm) Conformal SiN for sub-20 nm Copper/Low-k Interconnects
Nguyen, Son van, Priyadarshini, Deepika, Shobha, Hosadurga k, Haigh, Thomas J, Hu, Chao-kun, Cohen, Stephan A, Liniger, Eric, Shaw, Thomas M, Adams, Edward D, Burnham, Jay, Madan, Anita, Klymko, Nancy R, Parks, Christopher, Yang, Daewon, Molis, Steven E, Lin, Y, Bonilla, Griselda, Grill, Alfred, Edelstein, Daniel, Canaperi, Donald F, Xia, Li-Qun, Reiter, Steven, Balseanu, Mihaela, Shek, Mei-Yee
Published in ECS transactions (26.03.2014)
Published in ECS transactions (26.03.2014)
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Journal Article
Electrodeposited Cu Film Morphology on Thin PVD Cu Seed Layers
Kelly, James, Lin, Xuan, Nogami, Takeshi, van der Straten, O., Demarest, James, Li, Juntao, Murphy, Richard, Zhang, Xunyuan, Penny, Christopher, Parks, C., DeHaven, Patrick, Madan, Anita, Edelstein, Daniel
Published in ECS transactions (27.02.2014)
Published in ECS transactions (27.02.2014)
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Journal Article
Strained Si Channel MOSFETs with Embedded Silicon Carbon Formed by Solid Phase Epitaxy
Yaocheng Liu, Gluschenkov, O., Jinghong Li, Madan, A., Ozcan, A., Byeong Kim, Dyer, T., Chakravarti, A., Chan, K., Lavoie, C., Popova, I., Pinto, T., Rovedo, N., Zhijiong Luo, Loesing, R., Henson, W., Ken Rim
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
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Conference Proceeding
DISLOCATION ENGINEERING USING A SCANNED LASER
SCOTT JOHN CAMPBELL, LAI CHUNG WOH, SCHWARZ KLAUS, MADAN ANITA, LIU XIAO HU
Year of Publication 15.07.2011
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Year of Publication 15.07.2011
Patent
Congenital Anomalies in Second and Third Trimester- An Enigma
Madan, Anita, Pal, Davinder, Aggarwal, Tulika, Kaur, Prabhleen
Published in Journal of Advanced Medical and Dental Sciences Research (01.07.2019)
Published in Journal of Advanced Medical and Dental Sciences Research (01.07.2019)
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Journal Article
Modeling and acoustic microscopy measurements for evaluation of the adhesion between a film and a substrate
Guo, Zhiqi, Achenbach, J.D., Madan, Anita, Martin, Keith, Graham, M.E.
Published in Thin solid films (15.08.2001)
Published in Thin solid films (15.08.2001)
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Journal Article
Modeling and acoustic microscopy measurements for evaluation of the adhesion between a film and a substrate
ZHIQI GUO, ACHENBACH, J. D, MADAN, Anita, MARTIN, Keith, GRAHAM, M. E
Published in Thin solid films (15.08.2001)
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Published in Thin solid films (15.08.2001)
Journal Article
Recent Progress and Challenges in Enabling Embedded Si:C Technology
Yang, B F., Ren, Zhibin, Takalkar, Rohit, Black, Linda R., Dube, Abhishek, Weijtmans, J. W., Li, John, Chan, K, Souza, J P de, Madan, Anita, Xia, G., Zhu, Zhengmao, Faltermeier, J., Reznicek, A., Adam, Thomas N., Chakravarti, Ashima, Pei, G, Pal, Rohit, Yang, B, Harley, Eric C., Greene, B, Gehring, A, Cai, M, Sadana, D, Park, D, Mocuta, D, Schepis, Dominic J., Maciejewski, E, Luning, S, Leobandung, E
Published in ECS transactions (2009)
Published in ECS transactions (2009)
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Journal Article