ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
FEIGEL, EDDIE, MACK, JAMES FRANCIS, BRILLHART, PAUL, LO, KIN PONG, KUPPURAO, SATHEESH, REDFIELD, DANIEL, RAMACHANDRAN, BALASUBRAMANIAN, OLSEN, MICHAEL, VETORINO, BRETT, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M, HALPIN, RICHARD
Year of Publication 24.12.2014
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Year of Publication 24.12.2014
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THERMAL PROCESSING SUSCEPTOR
CHANG, ANZHONG, ZHU, ZUOMING, BRILLHART, PAUL, YE, ZHIYUAN, TONG, EDRIC, SHAH, KARTIK, RAMACHANDRAN, BALASUBRAMANIAN, LO, KIN, PONG, BAUTISTA, KEVIN, JOSEPH, MACK, JAMES, FRANCIS, LI, XUEBIN, CONG, ZHEPENG, NGO, ANHTHU, HUANG, YIIAU, CHU, SCHUBERT, S, MYO, NYI, O
Year of Publication 26.11.2015
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Year of Publication 26.11.2015
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THERMAL PROCESSING SUSCEPTOR
YE ZHIYUAN, CONG ZHEPENG, BAUTISTA KEVIN JOSEPH, LO KIN PONG, HUANG YIIAU, BRILLHART PAUL, CHANG ANZHONG, NGO ANHTHU, TONG EDRIC, MACK JAMES FRANCIS, SHAH KARTIK, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, RAMACHANDRAN BALASUBRAMANIAN, LI XUEBIN
Year of Publication 26.11.2015
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Year of Publication 26.11.2015
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Thermal processing susceptor
YE ZHIYUAN, CONG ZHEPENG, BAUTISTA KEVIN JOSEPH, LO KIN PONG, HUANG YIIAU, BRILLHART PAUL, CHANG ANZHONG, NGO ANHTHU, TONG EDRIC, MACK JAMES FRANCIS, SHAH KARTIK, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, RAMACHANDRAN BALASUBRAMANIAN, LI XUEBIN
Year of Publication 08.12.2020
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Year of Publication 08.12.2020
Patent
Upper dome with injection assembly
CARLSON, DAVID K, CHANG, ANZHONG, MACK, JAMES FRANCIS, SANCHEZ, ERROL ANTONIO C, BRILLHART, PAUL, YE, ZHIYUAN, TONG, EDRIC, SHAH, KARTIK, LO, KIN PONG, KUPPURAO, SATHEESH, RANISH, JOSEPH M
Year of Publication 11.07.2019
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Year of Publication 11.07.2019
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Absorbing reflector for semiconductor processing chamber
FEIGEL, EDDIE, MACK, JAMES FRANCIS, BRILLHART, PAUL, LO, KIN PONG, KUPPURAO, SATHEESH, REDFIELD, DANIEL, RAMACHANDRAN, BALASUBRAMANIAN, OLSEN, MICHAEL, VETORINO, BRETT, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M, HALPIN, RICHARD
Year of Publication 21.06.2019
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Year of Publication 21.06.2019
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Absorbing reflector for semiconductor processing chamber
FEIGEL, EDDIE, MACK, JAMES FRANCIS, BRILLHART, PAUL, LO, KIN PONG, KUPPURAO, SATHEESH, REDFIELD, DANIEL, RAMACHANDRAN, BALASUBRAMANIAN, OLSEN, MICHAEL, VETORINO, BRETT, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M, HALPIN, RICHARD
Year of Publication 16.09.2018
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Year of Publication 16.09.2018
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Absorbing reflector for semiconductor processing chamber
FEIGEL, EDDIE, MACK, JAMES FRANCIS, BRILLHART, PAUL, LO, KIN PONG, KUPPURAO, SATHEESH, REDFIELD, DANIEL, RAMACHANDRAN, BALASUBRAMANIAN, OLSEN, MICHAEL, VETORINO, BRETT, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M, HALPIN, RICHARD
Year of Publication 11.08.2018
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Year of Publication 11.08.2018
Patent
Light pipe structure window for low pressure thermal processes
YE ZHIYUAN, HUNTER AARON MUIR, LO KIN PONG, BRILLHART PAUL, CHANG ANZHONG, TONG EDRIC, MACK JAMES FRANCIS, SANCHEZ ERROL ANTONIO C, RANISH JOSEPH M
Year of Publication 22.02.2017
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Year of Publication 22.02.2017
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Thermal processing susceptor
CHANG, ANZHONG, BAUTISTA, KEVIN JOSEPH, CHU, SCHUBERT S, ZHU, ZUOMING, BRILLHART, PAUL, YE, ZHIYUAN, TONG, EDRIC, SHAH, KARTIK, MYO, NYI O, RAMACHANDRAN, BALASUBRAMANIAN, LI, XUEBIN, CONG, ZHEPENG, NGO, ANHTHU, MACK, JAMES FRANCIS, LO, KIN PONG, HUANG, YI CHIAU
Year of Publication 21.02.2019
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Year of Publication 21.02.2019
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ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
PATALAY KAILASH KIRAN, HALPIN RICHARD, FEIGEL EDDIE, LO KIN PONG, REDFIELD DANIEL, RAMACHANDRAN BALASUBRAMANIAN, BRILLHART PAUL, OLSEN MICHAEL, MACK JAMES FRANCIS, VETORINO BRETT, KUPPURAO SATHEESH, RANISH JOSEPH M
Year of Publication 05.01.2018
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Year of Publication 05.01.2018
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Recursive Pumping Member
YE ZHIYUAN, CARLSON DAVID K, LO KIN PONG, BRILLHART PAUL, CHANG ANZHONG, TONG EDRIC, SANCHEZ ERROL ANTONIO C, MACK JAMES FRANCIS
Year of Publication 29.06.2016
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Year of Publication 29.06.2016
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Absorbing reflector for semiconductor processing chamber
PATALAY KAILASH KIRAN, HALPIN RICHARD, FEIGEL EDDIE, REDFIELD DANIEL, LAO JIANBANG, RAMACHANDRAN BALASUBRAMANIAN, BRILLHART PAUL, OLSEN MICHAEL, MACK JAMES FRANCIS, VETORINO BRETT, KUPPURAO SATHEESH, RANISH JOSEPH M
Year of Publication 09.03.2016
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Year of Publication 09.03.2016
Patent
Light pipe structure window for low pressure thermal processes
CHANG, ANZHONG, HUNTER, AARON MUIR, MACK, JAMES FRANCIS, SANCHEZ, ERROL ANTONIO C, BRILLHART, PAUL, LO, KIN PONG, YE, ZHI-YUAN, RANISH, JOSEPH M
Year of Publication 01.01.2016
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Year of Publication 01.01.2016
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Upper dome with injection assembly
YE ZHIYUAN, CARLSON DAVID K, LO KIN PONG, BRILLHART PAUL, CHANG ANZHONG, TONG EDRIC, MACK JAMES FRANCIS, SANCHEZ ERROL ANTONIO C, SHAH KARTIK, KUPPURAO SATHEESH, RANISH JOSEPH M
Year of Publication 28.09.2016
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Year of Publication 28.09.2016
Patent
Absorbing reflector for semiconductor processing chamber
PATALAY KAILASH KIRAN, HALPIN RICHARD, FEIGEL EDDIE, LO KIN PONG, REDFIELD DANIEL, RAMACHANDRAN BALASUBRAMANIAN, BRILLHART PAUL, OLSEN MICHAEL, MACK JAMES FRANCIS, VETORINO BRETT, KUPPURAO SATHEESH, RANISH JOSEPH M
Year of Publication 15.06.2016
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Year of Publication 15.06.2016
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Thermal processing susceptor
YE ZHIYUAN, CONG ZHEPENG, BAUTISTA KEVIN JOSEPH, LO KIN PONG, HUANG YIIAU, BRILLHART PAUL, CHANG ANZHONG, NGO ANHTHU, TONG EDRIC, MACK JAMES FRANCIS, SHAH KARTIK, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, RAMACHANDRAN BALASUBRAMANIAN, LI XUEBIN
Year of Publication 22.02.2017
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Year of Publication 22.02.2017
Patent
Upper dome with injection assembly
CARLSON, DAVID K, CHANG, ANZHONG, MACK, JAMES FRANCIS, SANCHEZ, ERROL ANTONIO C, BRILLHART, PAUL, TONG, EDRIC, SHAH, KARTIK, LO, KIN PONG, KUPPURAO, SATHEESH, YE, ZHI-YUAN, RANISH, JOSEPH M
Year of Publication 01.12.2015
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Year of Publication 01.12.2015
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Absorbing reflector for semiconductor processing chamber
FEIGEL, EDDIE, MACK, JAMES FRANCIS, BRILLHART, PAUL, LO, KIN PONG, KUPPURAO, SATHEESH, REDFIELD, DANIEL, RAMACHANDRAN, BALASUBRAMANIAN, OLSEN, MICHAEL, VETORINO, BRETT, PATALAY, KAILASH KIRAN, RANISH, JOSEPH M, HALPIN, RICHARD
Year of Publication 01.01.2015
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Year of Publication 01.01.2015
Patent
Thermal processing susceptor
CHANG, ANZHONG, BAUTISTA, KEVIN JOSEPH, CHU, SCHUBERT S, BRILLHART, PAUL, LI, XUE-BIN, TONG, EDRIC, SHAH, KARTIK, MYO, NYI O, RAMACHANDRAN, BALASUBRAMANIAN, YE, ZHI-YUAN, ZHU, ZUO-MING, CONG, ZHEPENG, NGO, ANHTHU, MACK, JAMES FRANCIS, HUANG, YIIAU, LO, KIN PONG
Year of Publication 01.12.2015
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Year of Publication 01.12.2015
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