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Manufacturing method of semiconductor structure
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Year of Publication 09.12.2009
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Method for production of a semiconductor structure
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Year of Publication 08.09.2005
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METHOD FOR PRODUCTION OF A SEMICONDUCTOR STRUCTURE
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Year of Publication 15.06.2005
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Method of production of charge-trapping memory devices
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Year of Publication 05.10.2006
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Year of Publication 05.10.2006
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Production of a semiconductor structure comprises preparing a semiconductor substrate, providing a lower first, a middle second and an upper third mask layer on a surface of the substrate, and further processing
GENZ, OLIVER, STEGEMANN, MAIK, WEGE, STEPHAN, SCHMIDT, BARBARA, REB, ALEXANDER, MACHILL, STEFAN, KIRCHHOFF, MARKUS, STAVREV, MOMTCHIL
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Year of Publication 11.03.2004
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Verfahren zur Herstellung von Ladungseinfang-Speicherbauelementen
LUDWIG, CHRISTOPH, KRAUSE, MATHIAS, SCHLEY, JAN-MALTE, WEIN, GUENTER, ISLER, MARK, SACHSE, JENS-UWE, MACHILL, STEFAN, DEPPE, JOACHIM
Year of Publication 21.02.2013
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Year of Publication 21.02.2013
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Method of production of charge-trapping memory devices
DEPPE JOACHIM, MACHILL STEFAN, LUDWIG CHRISTOPH, WEIN GUNTHER, ISLER MARK, KRAUSE MATHIAS
Year of Publication 28.05.2008
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Year of Publication 28.05.2008
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Verfahren zur Herstellung von Charge-trapping-Speicherbauelementen
LUDWIG, CHRISTOPH, KRAUSE, MATHIAS, SCHLEY, JAN-MALTE, WEIN, GUENTER, ISLER, MARK, SACHSE, JENS-UWE, MACHILL, STEFAN, DEPPE, JOACHIM
Year of Publication 12.10.2006
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Year of Publication 12.10.2006
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METHOD FOR PRODUCTION OF A SEMICONDUCTOR STRUCTURE
GENZ, OLIVER, STEGEMANN, MAIK, WEGE, STEPHAN, SCHMIDT, BARBARA, REB, ALEXANDER, MACHILL, STEFAN, KIRCHHOFF, MARKUS, STAVREV, MOMTCHIL
Year of Publication 13.05.2004
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Year of Publication 13.05.2004
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METHOD FOR PRODUCTION OF A SEMICONDUCTOR STRUCTURE
GENZ, OLIVER, STEGEMANN, MAIK, WEGE, STEPHAN, SCHMIDT, BARBARA, REB, ALEXANDER, MACHILL, STEFAN, KIRCHHOFF, MARKUS, STAVREV, MOMTCHIL
Year of Publication 25.03.2004
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Year of Publication 25.03.2004
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Manufacturing method of semiconductor structure
GENZ, OLIVER, SCHMIDT, BARBARA, REB, ALEXANDER, MACHILL, STEFAN, MOMTCHIL STAVREV, STEPHAN WEGE, MAIK STEGEMANN, KIRCHHOFF, MARKUS
Year of Publication 01.03.2004
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Year of Publication 01.03.2004
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