Trench formation and lateral damage induced by gallium milling of silicon
Russo, Michael F., Maazouz, Mostafa, Giannuzzi, Lucille A., Chandler, Clive, Utlaut, M., Garrison, Barbara J.
Published in Applied surface science (15.12.2008)
Published in Applied surface science (15.12.2008)
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Nanoscale 3D Tomography by In-Flight Fluorescence Spectroscopy of Atoms Sputtered by a Focused Ion Beam
Budnik, Garrett, Scott, John A., Jiao, Chengge, Maazouz, Mostafa, Gledhill, Galen, Fu, Lan, Tan, Hark Hoe, Toth, Milos
Published in Nano letters (26.10.2022)
Published in Nano letters (26.10.2022)
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Journal Article
Nanoscale 3D tomography by in-flight fluorescence spectroscopy of atoms sputtered by a focused ion beam
Budnik, Garrett, Scott, John, Jiao, Chengge, Maazouz, Mostafa, Gledhill, Galen, Fu, Lan, Tan, Hark Hoe, Toth, Milos
Published in arXiv.org (21.06.2022)
Published in arXiv.org (21.06.2022)
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