Quantum size effects in GaAs nanodisks fabricated using a combination of the bio-template technique and neutral beam etching
Tamura, Yosuke, Kaizu, Toshiyuki, Kiba, Takayuki, Igarashi, Makoto, Tsukamoto, Rikako, Higo, Akio, Hu, Weiguo, Thomas, Cedric, Fauzi, Mohd Erman, Hoshii, Takuya, Yamashita, Ichiro, Okada, Yoshitaka, Murayama, Akihiro, Samukawa, Seiji
Published in Nanotechnology (19.07.2013)
Published in Nanotechnology (19.07.2013)
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Journal Article
High-density and sub-20-nm GaAs nanodisk array fabricated using neutral beam etching process for high performance QDs devices
Tamura, Y., Igarashi, M., Fauzi, M. E., Tsukamoto, R., Kaizu, T., Kiba, T., Yamashita, I., Okada, Y., Murayama, A., Samukawa, S.
Published in 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) (01.08.2012)
Published in 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) (01.08.2012)
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Conference Proceeding