Enhanced grating aligned patterning for EUV direct print processes
M Barghi, Seyedhamed, Paik, Marvin Y, Fang, Sheng-Po, Kadali, Shyam Benegal, Jeong, James Y, Guler, Leonard P, Wallace, Charles H
Year of Publication 30.07.2024
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Year of Publication 30.07.2024
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ENHANCED GRATING ALIGNED PATTERNING FOR EUV DIRECT PRINT PROCESSES
KADALI, Shyam Benegal, M BARGHI, Seyedhamed, FANG, Sheng-Po, WALLACE, Charles H, PAIK, Marvin Y, GULER, Leonard P, JEONG, James Y
Year of Publication 02.06.2022
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Year of Publication 02.06.2022
Patent
ENHANCED GRATING ALIGNED PATTERNING FOR EUV DIRECT PRINT PROCESSES
KADALI, Shyam Benegal, M BARGHI, Seyedhamed, FANG, Sheng-Po, WALLACE, Charles H, PAIK, Marvin Y, GULER, Leonard P, JEONG, James Y
Year of Publication 02.06.2022
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Year of Publication 02.06.2022
Patent
Enhanced grating aligned patterning for EUV direct print processes
GULER, LEONARD P, KADALI, SHYAM, M BARGHI, SEYEDHAMED, PAIK, MARVIN Y, FANG, SHENG-PO, JEONG, JAMES Y, WALLACE, CHARLES H
Year of Publication 01.08.2022
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Year of Publication 01.08.2022
Patent