Growth and characterization of ZnO films on (11-20) sapphire substrates by atomic layer deposition using DEZn and N2O
Yen, Kuo-Yi, Liu, Kuang-Pi, Gong, Jyh-Rong, Tsai, Kuen-Yau, Lyu, Dong-Yuan, Lin, Tai-Yuan, Ni, Guo-Yu, Jih, Far-Wen
Published in Journal of materials science. Materials in electronics (01.12.2009)
Published in Journal of materials science. Materials in electronics (01.12.2009)
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