Search Results - "Lymberopoulos, Dimitris" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Synchronous Pulse Plasma Operation upon Source and Bias Radio Frequencys for Inductively Coupled Plasma for Highly Reliable Gate Etching Technology

Synchronous Pulse Plasma Operation upon Source and Bias Radio Frequencys for Inductively Coupled Plasma for Highly Reliable Gate Etching Technology

by Tokashiki, Ken, Cho, Hong, Banna, Samer, Lee, Jeong-Yun, Shin, Kyoungsub, Todorow, Valentin, Kim, Woo-Seok, Bai, KeunHee, Joo, Sukho, Choe, Jeong-Dong, Ramaswamy, Kartik, Agarwal, Ankur, Rauf, Shahid, Collins, Ken, Choi, SangJun, Cho, Han, Kim, Hyun Joong, Lee, Changhun, Lymberopoulos, Dimitris, Yoon, Junho, Han, Woosung, Moon, Joo-Tae
Published in Japanese Journal of Applied Physics (01.08.2009)

Get full text

Journal Article

Fluid simulations of glow discharges : effect of metastable atoms in argon

Fluid simulations of glow discharges : effect of metastable atoms in argon

by LYMBEROPOULOS, D. P, ECONOMOU, D. J
Published in Journal of applied physics (15.04.1993)

Get full text

Journal Article

Two-dimensional simulation of polysilicon etching with chlorine in a high density plasma reactor

Two-dimensional simulation of polysilicon etching with chlorine in a high density plasma reactor

by Lymberopoulos, D.P., Economou, D.J.
Published in IEEE transactions on plasma science (01.08.1995)

Get full text

Journal Article

Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching

Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching

by Banna, S., Agarwal, A., Tokashiki, K., Hong Cho, Rauf, S., Todorow, V., Ramaswamy, K., Collins, K., Stout, P., Jeong-Yun Lee, Junho Yoon, Kyoungsub Shin, Sang-Jun Choi, Han-Soo Cho, Hyun-Joong Kim, Changhun Lee, Lymberopoulos, D.
Published in IEEE transactions on plasma science (01.09.2009)

Get full text

Journal Article

Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference RF Reference Cell

Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference RF Reference Cell

by Lymberopoulos, Dimitris P, Economou, Demetre J
Published in Journal of research of the National Institute of Standards and Technology (01.07.1995)

Get full text

Journal Article

METHOD AND APPARATUS EMPLOYING INTEGRATED METROLOGY FOR IMPROVED DIELECTRIC ETCH EFFICIENCY

METHOD AND APPARATUS EMPLOYING INTEGRATED METROLOGY FOR IMPROVED DIELECTRIC ETCH EFFICIENCY

by MOHAN SUKESH, HSUEH GARY, LYMBEROPOULOS DIMITRIS
Year of Publication 11.10.2011

Get full text

Patent

FAULT DETECTION AND VIRTUAL SENSOR METHODS FOR TOOL FAULT MONITORING

FAULT DETECTION AND VIRTUAL SENSOR METHODS FOR TOOL FAULT MONITORING

by LYMBEROPOULOS DIMITRIS P, REISS TERRY
Year of Publication 20.03.2002

Get full text

Patent

Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching: Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching: Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

by BANNA, Samer, AGARWAL, Ankur, JUNHO YOON, KYOUNGSUB SHIN, CHOI, Sang-Jun, CHO, Han-Soo, KIM, Hyun-Joong, CHANGHUN LEE, LYMBEROPOULOS, Dimitris, TOKASHIKI, Ken, HONG CHO, RAUF, Shahid, TODOROW, Valentin, RAMASWAMY, Kartik, COLLINS, Ken, STOUT, Phillip, LEE, Jeong-Yun
Published in IEEE transactions on plasma science (2009)

Get full text

Journal Article

RUN-TO-RUN CONTROL OVER SEMICONDUCTOR PROCESSING TOOL BASED UPON MIRROR IMAGE TARGET

RUN-TO-RUN CONTROL OVER SEMICONDUCTOR PROCESSING TOOL BASED UPON MIRROR IMAGE TARGET

by SHANMUGASUNDRAM ARULKUMAR, REISS TERRY, LYMBEROPOULOS DIMITRIS
Year of Publication 21.02.2002

Get full text

Patent

A new concept toward computer-aided medical diagnosis - a prototype implementation addressing pulmonary diseases

A new concept toward computer-aided medical diagnosis - a prototype implementation addressing pulmonary diseases

by Economou, G.-P., Lymberopoulos, D., Karavatselou, E., Chassomeris, C.
Published in IEEE transactions on information technology in biomedicine (01.03.2001)

Get full text

Journal Article

OTE-TS - a new value-added telematics service for telemedicine applications

OTE-TS - a new value-added telematics service for telemedicine applications

by Karavatselou, E.I., Economou, G.-P.K., Chassomeris, C.A., Danelli-Mylonas, V., Lymberopoulos, D.K.
Published in IEEE transactions on information technology in biomedicine (01.09.2001)

Get full text

Journal Article

Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations

Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations

by Lymberopoulos, D P, Economou, D J
Published in Journal of physics. D, Applied physics (14.04.1995)

Get full text

Journal Article

On optimal cell planning: Case study for a DCS 1800 system

On optimal cell planning: Case study for a DCS 1800 system

by Bouzouki, Stavroula, Kotsopoulos, Stavros, Karagiannidis, George, Chassomeris, Kostas, Lymberopoulos, Dimitris
Published in International journal of communication systems (01.11.2001)

Get full text

Journal Article

SELF-AWARE SEMICONDUCTOR EQUIPMENT

SELF-AWARE SEMICONDUCTOR EQUIPMENT

by LYMBEROPOULOS DIMITRIS, CHEUNG ROBIN
Year of Publication 30.04.2009

Get full text

Patent

Method and system for event detection in plasma processes

Method and system for event detection in plasma processes

by Agarwal, Ashish, Lymberopoulos, Dimitris
Year of Publication 28.02.2006

Get full text

Patent

Method and system for event detection in plasma processes

Method and system for event detection in plasma processes

by AGARWAL ASHISH, LYMBEROPOULOS DIMITRIS
Year of Publication 28.02.2006

Get full text

Patent

Method and system for event detection in plasma processes

Method and system for event detection in plasma processes

by AGARWAL ASHISH, LYMBEROPOULOS DIMITRIS
Year of Publication 04.12.2003

Get full text

Patent

Method and system for event detection in plasma processes

Method and system for event detection in plasma processes

by Agarwal, Ashish, Lymberopoulos, Dimitris
Year of Publication 04.12.2003

Get full text

Patent

FAULT DETECTION AND VIRTUAL SENSOR METHODS FOR TOOL FAULT MONITORING

FAULT DETECTION AND VIRTUAL SENSOR METHODS FOR TOOL FAULT MONITORING

by TERRY REISS, DIMITRIS LYMBEROPOULOS
Year of Publication 27.11.2003

Get full text

Patent