Study of Solving the Outgas Induced Defect in Metal Hard Mask All-in-One Etch Process
Lv, Yu-Kun, Jiang, Min, Liu, Bin, Zeng, Lin-Hua, Ren, Yu, Huang, Ya-Hui, Shi, Xiao-Bing, Yao, Li-Min
Published in ECS transactions (27.02.2014)
Published in ECS transactions (27.02.2014)
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Research on Fault Diagnosis System of Heat Pipe Network
Song, Bao Jun, Liu, Hai Feng, Zhao, Kai, Chang, Shuai, Lv, Yu Kun
Published in Applied Mechanics and Materials (01.08.2012)
Published in Applied Mechanics and Materials (01.08.2012)
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