INFLUENCE OF CURRENT DENSITY ON THE STRUCTURE OF AMORPHOUS SILICON SUBOXIDE THIN FILMS UNDER ELECTRON-BEAM ANNEALING
Baranov, E. A., Nepomnyashchikh, V. A., Konstantinov, V. O., Shchukin, V. G., Merkulova, I. E., Zamchiy, A. O., Lunev, N. A., Volodin, V. A., Shapovalova, A. A.
Published in Journal of applied mechanics and technical physics (01.10.2023)
Published in Journal of applied mechanics and technical physics (01.10.2023)
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Gold-Induced Crystallization of Thin Films of Amorphous Silicon Suboxide
Lunev, N. A., Zamchiy, A. O., Baranov, E. A., Merkulova, I. E., Konstantinov, V. O., Korolkov, I. V., Maximovskiy, E. A., Volodin, V. A.
Published in Technical physics letters (01.10.2021)
Published in Technical physics letters (01.10.2021)
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HIGH-TEMPERATURE ANNEALING OF SILICON SUBOXIDE THIN FILMS OBTAINED BY GAS-JET ELECTRON BEAM PLASMA CHEMICAL VAPOR DEPOSITION
Baranov, E. A., Zamchiy, A. O., Lunev, N. A., Merkulova, I. E., Volodin, V. A., Sharafutdinov, M. R., Shapovalova, A. A.
Published in Journal of applied mechanics and technical physics (01.11.2022)
Published in Journal of applied mechanics and technical physics (01.11.2022)
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Journal Article
Indium-Induced Crystallization of Thin Films of Amorphous Silicon Suboxide
Zamchiy, A. O., Baranov, E. A., Merkulova, I. E., Lunev, N. A., Volodin, V. A., Maksimovskii, E. A.
Published in Technical physics letters (01.06.2020)
Published in Technical physics letters (01.06.2020)
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Journal Article
Electron-Beam Crystallization of Thin Films of Amorphous Silicon Suboxide
Baranov, E. A., Konstantinov, V. O., Shchukin, V. G., Zamchiy, A. O., Merkulova, I. E., Lunev, N. A., Volodin, V. A.
Published in Technical physics letters (01.03.2021)
Published in Technical physics letters (01.03.2021)
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Calculation of cutterpath errors in machining GTE monoimpeller vane channels with annular cutting tools
Lunev, A. N., Moiseeva, L. T., Starikov, A. V., Ermakov, R. S.
Published in Russian aeronautics (01.09.2007)
Published in Russian aeronautics (01.09.2007)
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Kinetics of gold-induced layer exchange crystallization of amorphous silicon suboxide films: Experimental and theoretical study
Zamchiy, A.O., Vorobyov, Y.V., Lunev, N.A., Konstantinov, V.O., Sakhapov, S.Z., Maximovskiy, E.A., Baranov, E.A.
Published in Journal of alloys and compounds (05.04.2023)
Published in Journal of alloys and compounds (05.04.2023)
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Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide
Zamchiy, A.O., Baranov, E.A., Starinskiy, S.V., Lunev, N.A., Merkulova, I.E.
Published in Vacuum (01.10.2021)
Published in Vacuum (01.10.2021)
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Journal Article
Activation energy of gold-induced crystallization of amorphous silicon suboxide films
Zamchiy, A.O., Baranov, E.A., Konstantinov, V.O., Lunev, N.A., Sakhapov, S.Z., Korolkov, I.V., Volodin, V.A.
Published in Materials letters (15.09.2022)
Published in Materials letters (15.09.2022)
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