Search Results - "Lukens, Joshua Mark" :: K.UTB vyhledávací portál

by ERSHOV ALEXANDER IGOREVICH, ROLLINGER BOB, VASCHENKO GEORGIY OLEGOVICH, ABRAHAM MATHEW CHEERAN, LUKENS JOSHUA MARK, RAJYAGURU CHIRAG
Year of Publication 01.07.2021

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ＥＵＶ 소스를 위한 액적 생성기에서 액적을 가속시키는 장치 및 방법

by ERSHOV ALEXANDER IGOREVICH, DRIESSEN THEODORUS WILHELMUS, TREES DIETMAR UWE HERBERT, VASCHENKO GEORGIY OLEGOVICH, RAFAC ROBERT JAY, LUKENS JOSHUA MARK, RAJYAGURU CHIRAG
Year of Publication 27.02.2023

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APPARATUS FOR AND METHOD OF MONITORING DROPLETS IN A DROPLET STREAM

by Lukens, Joshua Mark
Year of Publication 26.01.2023

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APPARATUS FOR AND METHOD OF MONITORING DROPLETS IN A DROPLET STREAM

by LUKENS, Joshua, Mark
Year of Publication 26.10.2022

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APPARATUS FOR AND METHOD OF CONTROLLING DROPLET FORMATION

by JOSHUA MARK LUKENS
Year of Publication 23.11.2020

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Apparatus for and method of controlling coalescence of droplets in a droplet stream

by Rollinger, Bob, Lukens, Joshua Mark, Beyhaghi, Pooriya
Year of Publication 01.02.2022

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SOURCE MATERIAL DELIVERY SYSTEM, EUV RADIATION SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

by Kinney, Charles Edward, Rollinger, Bob, Lukens, Joshua Mark, Beyhaghi, Pooriya
Year of Publication 12.01.2023

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PRESSURE-ENERGIZED FERRULE FOR HIGH PRESSURE DROPLET GENERATOR NOZZLE

by LUKENS, Joshua, Mark, GANNA, Sreedhar, ROLLINGER, Bob, KAPADIA, Rahul, Sunil, VASCHENKO, Georgiy, Olegovich
Year of Publication 01.05.2024

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APPARATUS FOR AND METHOD OF CONTROLLING COALESCENCE OF DROPLETS IN A DROPLET STREAM

by Rollinger, Bob, Lukens, Joshua Mark, Beyhaghi, Pooriya
Year of Publication 29.10.2020

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Apparatus for and method of monitoring droplets in a droplet stream

by LUKENS, JOSHUA MARK
Year of Publication 16.10.2021

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Apparatus and method for extending target material delivery system lifetime

by Abraham, Mathew Cheeran, Rajyaguru, Chirag, Rollinger, Bob, Vaschenko, Georgiy Olegovich, Lukens, Joshua Mark, Ershov, Alexander Igorevich
Year of Publication 27.06.2023

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Target material control in an EUV light source

by Willems, Petrus Adrianus, Kincal, Serkan, Tedrow, Jon David, Rai, Sandeep, Lukens, Joshua Mark, Bessems, David, Govindaraju, Abhiram Lakshmi Ganesh
Year of Publication 16.04.2024

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