Investigation of thin titanium carbonitride coatings deposited onto stainless steel
Miller, Timothy, Lin, Jia-Ming, Pirolli, Laurent, Coquilleau, Laurent, Luharuka, Rajesh, Teplyakov, Andrew V.
Published in Thin solid films (01.11.2012)
Published in Thin solid films (01.11.2012)
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Journal Article
A bistable electromagnetically actuated rotary gate microvalve
Luharuka, Rajesh, Hesketh, Peter J
Published in Journal of micromechanics and microengineering (01.03.2008)
Published in Journal of micromechanics and microengineering (01.03.2008)
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Journal Article
Improved manufacturability and characterization of a corrugated Parylene diaphragm pressure transducer
Luharuka, Rajesh, Noh, Hongseok (Moses), Kim, Sang Kyung, Mao, Hua, Wong, Lid, Hesketh, Peter J
Published in Journal of micromechanics and microengineering (01.08.2006)
Published in Journal of micromechanics and microengineering (01.08.2006)
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Journal Article