Direct Emissions Reduction in Plasma Dry Etching Using Alternate Chemistries: Opportunities, Challenges and Need for Collaboration
Lugani, Gurpreet S., Skaggs, Robert, Morris, Bryan, Tolman, Tyler, Tervo, Douglas, Uhlenbrock, Stefan, Hacker, Jon, Tan, Chye Seng, Nehlsen, James P., Ridgeway, Robert G., Broadway, Lois Wong, Rudy, Francis P.
Published in IEEE transactions on semiconductor manufacturing (14.08.2024)
Published in IEEE transactions on semiconductor manufacturing (14.08.2024)
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Journal Article
Storage node shaping
Kelkar, Sanket S, Lugani, Gurpreet S, Sapra, Sanjeev, Paduano, Paul A, Petz, Christopher W, Shreeram, Devesh Dadhich, Rocklein, Matthew N
Year of Publication 20.10.2020
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Year of Publication 20.10.2020
Patent
Method for storage node shaping
ROCKLEIN MATTHEW N, LUGANI GURPREET S, SHREERAM DEVESH DADHICH, KELKAR SANKET S, PADUANO PAUL A, PETZ CHRISTOPHER W, SAPRA SANJEEV
Year of Publication 24.11.2020
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Year of Publication 24.11.2020
Patent
CONDUCTIVE INTERCONNECTS AND METHODS OF FORMING CONDUCTIVE INTERCONNECTS
LUGANI, GURPREET, PRATT, DAVE, SUNG, YUNG-TA, SPEETJENS, FRANK, AHMED, RAJU, KEWLEY, DAVID A
Year of Publication 21.05.2022
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Year of Publication 21.05.2022
Patent
Conductive interconnects and methods of forming conductive interconnects
LUGANI, GURPREET, PRATT, DAVE, SUNG, YUNG-TA, SPEETJENS, FRANK, AHMED, RAJU, KEWLEY, DAVID A
Year of Publication 16.10.2021
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Year of Publication 16.10.2021
Patent
Conductive Interconnects and Methods of Forming Conductive Interconnects
AHMED RAJU, SPEETJENS FRANK, PRATER DAVID, KEWLEY DAVID A, LUGANI GURPREET, SUNG YUNG-TA
Year of Publication 18.06.2021
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Year of Publication 18.06.2021
Patent
INTEGRATED CIRCUIT, CONSTRUCTION OF INTEGRATED CIRCUITRY, AND METHOD OF FORMING AN ARRAY
DI CINO MARIO J, FREESE AARON W, LUGANI GURPREET, CAMPBELL KYLE B, SHEA KEVIN R, KOGAN ALEX
Year of Publication 26.02.2021
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Year of Publication 26.02.2021
Patent