Direct Emissions Reduction in Plasma Dry Etching Using Alternate Chemistries: Opportunities, Challenges and Need for Collaboration
Lugani, Gurpreet S., Skaggs, Robert, Morris, Bryan, Tolman, Tyler, Tervo, Douglas, Uhlenbrock, Stefan, Hacker, Jon, Tan, Chye Seng, Nehlsen, James P., Ridgeway, Robert G., Broadway, Lois Wong, Rudy, Francis P.
Published in IEEE transactions on semiconductor manufacturing (14.08.2024)
Published in IEEE transactions on semiconductor manufacturing (14.08.2024)
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Journal Article
집적 회로, 집적 회로 구성, 및 어레이 형성 방법
DI CINO MARIO J, FREESE AARON W, LUGANI GURPREET, CAMPBELL KYLE B, SHEA KEVIN R, KOGAN ALEX
Year of Publication 21.01.2021
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Year of Publication 21.01.2021
Patent
Memory Circuitry Comprising Strings Of Memory Cells
Lugani, Gurpreet, Pandey, Sumeet C, Vaidya, Dhirendra Dhananjay, Wei, Lei
Year of Publication 05.10.2023
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Year of Publication 05.10.2023
Patent
Conductive interconnects and methods of forming conductive interconnects
Kewley, David A, Ahmed, Raju, Lugani, Gurpreet, Speetjens, Frank, Pratt, Dave, Sung, Yung-Ta
Year of Publication 07.05.2024
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Year of Publication 07.05.2024
Patent
Conductive Interconnects and Methods of Forming Conductive Interconnects
Kewley, David A, Ahmed, Raju, Lugani, Gurpreet, Speetjens, Frank, Pratt, Dave, Sung, Yung-Ta
Year of Publication 23.06.2022
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Year of Publication 23.06.2022
Patent
Conductive interconnects and methods of forming conductive interconnects
Kewley, David A, Ahmed, Raju, Lugani, Gurpreet, Speetjens, Frank, Pratt, Dave, Sung, Yung-Ta
Year of Publication 10.05.2022
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Year of Publication 10.05.2022
Patent
Integrated circuit, construction of integrated circuitry, and method of forming an array
Lugani, Gurpreet, Di Cino, Mario J, Freese, Aaron W, Shea, Kevin R, Campbell, Kyle B, Kogan, Alex
Year of Publication 07.06.2022
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Year of Publication 07.06.2022
Patent
Conductive Interconnects and Methods of Forming Conductive Interconnects
Kewley, David A, Ahmed, Raju, Lugani, Gurpreet, Speetjens, Frank, Pratt, Dave, Sung, Yung-Ta
Year of Publication 24.06.2021
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Year of Publication 24.06.2021
Patent