Study of the temporal stability of the reflection coefficient in the vicinity of 58.4 nm of narrow-band Sc/Al mirrors with Si or ScN interlayers and a MoSi2 protective cap layer
Chkhalo, N.I., Drozdov, M.N., Lopatin, A.Ya, Luchin, V.I., Salashchenko, N.N., Zuev, S.Yu, Tsybin, N.N.
Published in Thin solid films (01.10.2023)
Published in Thin solid films (01.10.2023)
Get full text
Journal Article
Study of the temporal stability of the reflection coefficient in the vicinity of 58.4 nm of narrow-band Sc/Al mirrors with Si or ScNx interlayers and a MoSi2 protective cap layer
Chkhalo, N.I., Drozdov, M.N., Lopatin, A.Ya, Luchin, V.I., Salashchenko, N.N., Zuev, S.Yu, Tsybin, N.N.
Published in Thin solid films (31.10.2023)
Published in Thin solid films (31.10.2023)
Get full text
Journal Article
Study of heat induced changes in elastic properties of multilayer Mo/ZrSi 2 membranes
Chkhalo, N.I., Kluenkov, E.B., Lopatin, A.Ya, Luchin, V.I., Salashchenko, N.N., Sjmaenok, L.A., Tsybin, N.N.
Published in Thin solid films (01.06.2017)
Published in Thin solid films (01.06.2017)
Get full text
Journal Article
Study of heat induced changes in elastic properties of multilayer Mo/ZrSi2 membranes
Chkhalo, N.I., Kluenkov, E.B., Lopatin, A.Ya, Luchin, V.I., Salashchenko, N.N., Sjmaenok, L.A., Tsybin, N.N.
Published in Thin solid films (01.06.2017)
Published in Thin solid films (01.06.2017)
Get full text
Journal Article
Freestanding film structures for laser plasma experiments
Kluenkov, E.B., Lopatin, A.Ya, Luchin, V.I., Salashchenko, N.N., Tsybin, N.N.
Published in Quantum electronics (Woodbury, N.Y.) (01.01.2013)
Published in Quantum electronics (Woodbury, N.Y.) (01.01.2013)
Get full text
Journal Article
New focusing multilayer structures for X-ray and VUV plasma spectroscopy
Lopatin, A. Ya, Luchin, V. I., Salashchenko, N. N., Chkhalo, N. I., Shevelko, A. P., Yakushev, O. F.
Published in Technical physics (01.07.2010)
Published in Technical physics (01.07.2010)
Get full text
Journal Article
Application of free-standing multilayer films as polarizers for X-ray radiation
Andreev, S.S., Bibishkin, M.S., Chkhalo, N.I., Lopatin, A.Ya, Luchin, V.I., Pestov, A.E., Prokhorov, K.A., Salaschchenko, N.N.
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.05.2005)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.05.2005)
Get full text
Journal Article
PMMA-based resists for a spectral range near 13nm
Bulgakova, S.A, Lopatin, A.Ya, Luchin, V.I, Mazanova, L.M, Molodnjakov, S.A, Salashchenko, N.N
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.06.2000)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.06.2000)
Get full text
Journal Article
PMMA-based resists for a spectral range near 13 nm
Bulgakova, S.A, Lopatin, A.Ya, Luchin, V.I, Mazanova, L.M, Molodnjakov, S.A, Salashchenko, N.N
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
Get full text
Journal Article
Y-Ba-Cu-O thin films composition formation during magnetron sputtering
Drozdov, M.N., Gaponov, S.V., Gusev, S.A., Kluenkov, E.B., Luchin, V.I., Masterov, D.V., Saykov, S.K., Vorobiev, A.K.
Published in IEEE transactions on applied superconductivity (01.06.1999)
Published in IEEE transactions on applied superconductivity (01.06.1999)
Get full text
Journal Article
Conference Proceeding
Mirror-trapped plasma heated by high-power millimeter wave radiation as an ECR source of soft X-rays
Vodopyanov, A.V., Golubev, S.V., Zorin, V.G., Kryachko, A.Yu, Lopatin, Yu.A., Luchin, V.I., Razin, S.V., Smirnov, A.N.
Published in 2000 13th International Conference on High-Power Particle Beams (01.06.2000)
Get full text
Published in 2000 13th International Conference on High-Power Particle Beams (01.06.2000)
Conference Proceeding
Positive resists for electron-beam and X-ray lithography
Bulgakova, S.A., Mazanova, L.M., Semchikov, Yu.D., Lopatin, A.Y., Luchin, V.I., Salashchenko, N.N.
Published in 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) (1998)
Published in 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) (1998)
Get full text
Conference Proceeding