Microelectromechanical isolating circuit
LUCAK, MARK, A, POND, ROBERT, J, DISCENZO, FREDERICK, M, HERBERT, PATRICK, C, KNIESER, MICHAEL, J, KRETSCHMANN, ROBERT, J, SZABO, LOUIS, F, HARRIS, RICHARD, D
Year of Publication 03.09.2014
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Year of Publication 03.09.2014
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Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
LUCAK MARK A, KNIESER MICHAEL J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 17.06.2008
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Year of Publication 17.06.2008
Patent
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
LUCAK MARK A, KNIESER MICHAEL J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 11.05.2006
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Year of Publication 11.05.2006
Patent
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
LUCAK MARK A, KNIESER MICHAEL J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 28.03.2006
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Year of Publication 28.03.2006
Patent
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
LUCAK MARK A, KNIESER MICHAEL J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 30.12.2004
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Year of Publication 30.12.2004
Patent
Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
LUCAK MARK A, KNIESER MICHAEL J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 09.11.2004
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Year of Publication 09.11.2004
Patent
Microelectromechanical isolating circuit
Harris, Richard, Knieser, Michael, Pond, Robert, Szabo, Louis, Discenzo, Frederick, Herbert, Patrick, Kretschmann, Robert, Lucak, Mark
Year of Publication 30.09.2004
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Year of Publication 30.09.2004
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