Investigation on hexamethyldisilazane vapor treatment of plasma-damaged nanoporous organosilicate films
Rajagopalan, T., Lahlouh, B., Lubguban, J.A., Biswas, N., Gangopadhyay, S., Sun, J., Huang, D.H., Simon, S.L., Toma, D., Butler, R.
Published in Applied surface science (15.07.2006)
Published in Applied surface science (15.07.2006)
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Post treatments of plasma-enhanced chemical vapor deposited hydrogenated amorphous silicon carbide for low dielectric constant films
Lahlouh, B., Rajagopalan, T., Biswas, N., Sun, J., Huang, D., Simon, S.L., Lubguban, J.A., Gangopadhyay, S.
Published in Thin solid films (21.02.2006)
Published in Thin solid films (21.02.2006)
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Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics
Lubguban, J.A., Gangopadhyay, S., Lahlouh, B., Rajagopalan, T., Biswas, N., Sun, J., Huang, D.H., Simon, S.L., Mallikarjunan, A., Kim, H-C., Hedstrom, J., Volksen, W., Miller, R.D., Toney, M.F.
Published in Journal of materials research (01.11.2004)
Published in Journal of materials research (01.11.2004)
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Journal Article
Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
LUBGUBAN, A. A, LUBGUBAN, J. A, OTHMAN, M. T, SHENDE, R. V, GANGOPADHYAY, S, MILLER, R. D, VOLKSEN, W, KIM, H.-C
Published in Thin solid films (02.06.2008)
Published in Thin solid films (02.06.2008)
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Journal Article
Effects of Nitrogen Addition to Fluorinated Silicon Dioxide Films
Hasegawa, Seiichi, Saito, Atsusi, Lubguban, Jorge A., Inokuma, Takao, Kurata, Yoshihiro
Published in Japanese Journal of Applied Physics (01.09.1998)
Published in Japanese Journal of Applied Physics (01.09.1998)
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Journal Article
METHOD AND COMPOSITION FOR DEPOSITING RUTHENIUM WITH ASSISTIVE METAL SPECIES
LI, WEIMIN, XU, CHONGYING, LUBGUBAN, JORGE, A., JR, CAMERON, THOMAS, M
Year of Publication 28.10.2011
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Year of Publication 28.10.2011
Patent
METHOD AND COMPOSITION FOR DEPOSITING RUTHENIUM WITH ASSISTIVE METAL SPECIES
LI, WEIMIN, XU, CHONGYING, LUBGUBAN, JORGE, A., JR, CAMERON, THOMAS, M
Year of Publication 20.01.2011
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Year of Publication 20.01.2011
Patent
METHOD AND COMPOSITION FOR DEPOSITING RUTHENIUM WITH ASSISTIVE METAL SPECIES
LI, WEIMIN, XU, CHONGYING, LUBGUBAN, JORGE, A., JR, CAMERON, THOMAS, M
Year of Publication 23.09.2010
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Year of Publication 23.09.2010
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