Fabrication and characterization of a nano-convex-embedded Si MOSFET for nano-scale electrical discrimination
Mizuno, Shintaro, Lu, Renpeng, Shimizu, Katsumi, Ueba, Yosuke, Ishikawa, Mikio, Kitamura, Mitsuru, Hoga, Morihisa, Kasai, Seiya
Published in Japanese Journal of Applied Physics (01.06.2021)
Published in Japanese Journal of Applied Physics (01.06.2021)
Get full text
Journal Article