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"Lu, Hung-Yueh"
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"Lu, Hung-Yueh"
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Method and system for self-convergent erase in charge trapping memory cells
by
HUNG
-
YUEH
,
LU
CHEN
Year of Publication
24.10.2007
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Method for preparing a structure with high aspect ratio
by
Lu
,
Hung Yueh
,
Chang, Hong Long
,
Lee, Yung Kai
,
Chang, Chih Hao
Year of Publication
18.03.2008
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Defects reduction for a metal etcher
by
Lu
,
Hung
-
Yueh
,
Lee, Ray C
,
Chang, Hong-Long
Year of Publication
04.06.2002
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Etching system and method for treating the etching solution thereof
by
LU
,
HUNG
-
YUEH
,
CHANG, HONG-LONG
Year of Publication
01.07.2005
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Method for preparing a structure with high aspect ratio
by
LU HUNG YUEH
,
CHANG HONG LONG
,
LEE YUNG KAI
,
CHANG CHIH HAO
Year of Publication
18.03.2008
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Method for preparing structure with high aspect ratio
by
LU
,
HUNG
-
YUEH
,
LEE, YUNG-KAI
,
CHANG, HONG-LONG
,
CHANG, CHIH-HAO
Year of Publication
21.05.2006
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Defects reduction for a metal etcher
by
CHANG HONG-LONG
,
LEE RAY C
,
LU HUNG
-
YUEH
Year of Publication
04.06.2002
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Dry cleaning process used in the manufacture of semiconductors comprises preparing an etched metallized structure, arranging in a processing chamber, and cleaning using a mixture of a fluorine-containing gas and an oxygen-containing gas
by
LU
,
HUNG
-
YUEH
,
KUNG, MING-LI
,
CHANG, HONG-LONG
,
LIU, FANG-FEI
Year of Publication
25.04.2002
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In-situ structurization and cleaning of metal wiring of semiconductor, used for producing device, integrated circuit or connection between them, uses 3-stage reactive ionic etching and fourth etching stage to remove polymer
by
LU
,
HUNG
-
YUEH
,
LEE, RAY C
,
CHANG, HONG-LONG
Year of Publication
11.04.2002
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Via etch post cleaning process
by
LU
,
HUNG
-
YUEH
,
CHANG, HONG-LONG
,
LIU, FANG-FEI
Year of Publication
21.11.2001
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Cleaning method of the residual material after removing photoresist
by
LU
,
HUNG
-
YUEH
,
KUNG, MING-LI
,
CHANG, HONG-LONG
,
LIU, FANG-FEI
Year of Publication
21.08.2001
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Etching system and method for treating the etching solution thereof
by
LU
,
HUNG
-
YUEH
,
CHANG, HONG-LONG
Year of Publication
01.12.2005
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Method for preparing structure with high aspect ratio
by
LU
,
HUNG
-
YUEH
,
LEE, YUNG-KAI
,
CHANG, HONG-LONG
,
CHANG, CHIH-HAO
Year of Publication
01.08.2006
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Trockenreinigungsverfahren statt der herkömmlichen Nassreinigung nach der Ätzung von Metallen
by
LU
,
HUNG
-
YUEH
,
KUNG, MING-LI
,
CHANG, HONG-LONG
,
LIU, FANG-FEI
Year of Publication
13.07.2006
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