Synthesis and Properties of Diazopiperidiones for Use in Nonchemically Amplified Deep UV Photoresists
Tattersall, Peter I, Breslin, David, Grayson, Scott M, Heath, William H, Lou, Kathleen, McAdams, Christopher L, McKean, Dennis, Rathsack, Benjamen M, Willson, C. Grant
Published in Chemistry of materials (04.05.2004)
Published in Chemistry of materials (04.05.2004)
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