Deep multilevel wet etching of fused silica glass microstructures in BOE solution
Konstantinova, T. G., Andronic, M. M., Baklykov, D. A., Stukalova, V. E., Ezenkova, D. A., Zikiy, E. V., Bashinova, M. V., Solovev, A. A., Lotkov, E. S., Ryzhikov, I. A., Rodionov, I. A.
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Published in Scientific reports (30.03.2023)
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Published in IOP conference series. Materials Science and Engineering (01.04.2020)
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Year of Publication 04.03.2024
Year of Publication 04.03.2024
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Journal Article
Deep multilevel wet etching of fused silica glass microstructures in BOE solution
Konstantinova, T. G, Andronic, M. M, Baklykov, D. A, Stukalova, V. E, Ezenkova, D. A, Zikiy, E. V, Bashinova, M. V, Solovev, A. A, Lotkov, E. S, Ryzhikov, I. A, Rodionov, I. A
Year of Publication 13.12.2022
Year of Publication 13.12.2022
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Published in 2022 International Conference Laser Optics (ICLO) (20.06.2022)
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Aluminum Josephson junction microstructure and electrical properties modification with thermal annealing
Korshakov, N D, Moskalev, D O, Soloviova, A A, Moskaleva, D A, Lotkov, E S, Ibragimov, A R, Androschuk, M V, Ryzhikov, I A, Panfilov, Y V, Rodionov, I A
Published in arXiv.org (04.03.2024)
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Published in arXiv.org (04.03.2024)
Paper
Deep multilevel wet etching of fused silica glass microstructures in BOE solution
Konstantinova, T G, Andronic, M M, Baklykov, D A, Stukalova, V E, Ezenkova, D A, Zikiy, E V, Bashinova, M V, Solovev, A A, Lotkov, E S, Ryzhikov, I A, Rodionov, I A
Published in arXiv.org (13.12.2022)
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Published in arXiv.org (13.12.2022)
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