Positive resists for electron-beam and X-ray lithography
Bulgakova, S.A., Mazanova, L.M., Semchikov, Yu.D., Lopatin, A.Y., Luchin, V.I., Salashchenko, N.N.
Published in 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) (1998)
Published in 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) (1998)
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